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Volumn 89, Issue 1, 2013, Pages 90-95

Synthesis and properties of crystalline TiO 2 films deposited by a HIPIMS technique

Author keywords

Dielectric constant; High power impulse magnetron sputtering; Phase structure; Photocatalytic properties; TiO 2film

Indexed keywords

COATING SYSTEM; CRYSTALLINE-TIO; DEPOSITION PARAMETERS; GLASS SUBSTRATES; HIGH DIELECTRIC CONSTANTS; HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS); OXYGEN DEFICIENCY; OXYGEN FLUXES; PHOTOCATALYTIC PROPERTY; PHOTOINDUCED HYDROPHILICITY; POTENTIAL APPLICATIONS; POWER PULSE; RUTILE FILMS; TIO; WORKING GAS PRESSURE;

EID: 84869095914     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.11.020     Document Type: Conference Paper
Times cited : (31)

References (33)
  • 19
    • 84869094575 scopus 로고    scopus 로고
    • http://www.hauzertechnocoating.com/index/EN/HIPIMS+/78/0/


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.