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Volumn 89, Issue 1, 2013, Pages 90-95
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Synthesis and properties of crystalline TiO 2 films deposited by a HIPIMS technique
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Author keywords
Dielectric constant; High power impulse magnetron sputtering; Phase structure; Photocatalytic properties; TiO 2film
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Indexed keywords
COATING SYSTEM;
CRYSTALLINE-TIO;
DEPOSITION PARAMETERS;
GLASS SUBSTRATES;
HIGH DIELECTRIC CONSTANTS;
HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS);
OXYGEN DEFICIENCY;
OXYGEN FLUXES;
PHOTOCATALYTIC PROPERTY;
PHOTOINDUCED HYDROPHILICITY;
POTENTIAL APPLICATIONS;
POWER PULSE;
RUTILE FILMS;
TIO;
WORKING GAS PRESSURE;
CRYSTALLINE MATERIALS;
DEPOSITS;
OXIDE MINERALS;
PERMITTIVITY;
PHASE STRUCTURE;
PHOTOCATALYSIS;
SILICON;
SUBSTRATES;
TITANIUM DIOXIDE;
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EID: 84869095914
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2011.11.020 Document Type: Conference Paper |
Times cited : (31)
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References (33)
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