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Volumn 139, Issue 2-3, 2013, Pages 979-987

Growth of nanocrystalline TiO2 thin films and crystal anisotropy of anatase phase deposited by direct current reactive magnetron sputtering

(4) Sarma, Bimal K a,b Pal, Arup R a Bailung, Heremba a Chutia, Joyanti a

a INSTITUTE OF ADVANCED STUDY IN SCIENCE AND TECHNOLOGY (India)

b GAUHATI UNIVERSITY (India)

Author keywords

Elastic properties; Luminescence; Microstructure; Sputtering; Thin films

Indexed keywords

ELASTIC PROPERTIES; LATTICE MICROSTRAIN; NANO-CRYSTALLINE TIO; NANOCRYSTALLINE ANATASE; POLYCRYSTALLINE AGGREGATES; REACTIVE MAGNETRON SPUTTERING; UNIFORM DEFORMATION; X RAY DIFFRACTION LINE PROFILE ANALYSIS;

ANISOTROPIC MEDIA; ANISOTROPY; DEPOSITS; ELASTIC MODULI; LUMINESCENCE; MAGNETRON SPUTTERING; MICROSTRUCTURE; SPUTTERING; THIN FILMS; X RAY DIFFRACTION;

TITANIUM DIOXIDE;

EID: 84875920267 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/j.matchemphys.2013.03.002 Document Type: Article

Times cited : (23)

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