SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 300, Issue 1-2, 1997, Pages 113-121

Microstructure modification of amorphous titanium oxide thin films during annealing treatment

(5) Martin, Nicolas a Rousselot, Christophe a Rondot, Daniel a Palmino, Franck b Mercier, René c

a Lab Metrologie Interfaces T (France)

b Lab Phys Metrologie Oscillateurs (France)

c Lab Electrochimie Syst M (France)

Author keywords

Atomic force microscopy (AFM); Optical properties; Phase transitions; Physical vapour deposition (PVD)

Indexed keywords

AMORPHOUS FILMS; ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; MAGNETRON SPUTTERING; MORPHOLOGY; PHASE TRANSITIONS; REFRACTIVE INDEX; THERMAL EFFECTS; TITANIUM OXIDES; VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

AMORPHOUS TITANIUM OXIDE THIN FILMS; PHYSICAL VAPOR DEPOSITION (PVD);

THIN FILMS;

EID: 0031143137 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09510-7 Document Type: Article

Times cited : (263)

References (35)

1
- 0029408455
- Y. Paz, Z. Luo, L. Rabenberg and A. Heller, J. Mater. Res., 10 (1995) 2842.
- (1995) J. Mater. Res. , vol.10 , pp. 2842
- Paz, Y.¹ Luo, Z.² Rabenberg, L.³ Heller, A.⁴

2
- 21844518085
- H. Segikuchi, A. Kanzawa, T. Imai and T. Honda, J. Vac. Sci. Technol. A, 12 (1994) 3176.
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 3176
- Segikuchi, H.¹ Kanzawa, A.² Imai, T.³ Honda, T.⁴

3
- 26344455153
- K.M. Glassford and J.R. Chelikowsky, Phys. Rev. B, 46 (1992) 1284.
- (1992) Phys. Rev. B , vol.46 , pp. 1284
- Glassford, K.M.¹ Chelikowsky, J.R.²

4
- 0029291785
- M.P. Cantao, J.I. Cisneros and R.M. Torresi, Thin Solid Films, 259 (1995) 70-74.
- (1995) Thin Solid Films , vol.259 , pp. 70-74
- Cantao, M.P.¹ Cisneros, J.I.² Torresi, R.M.³

5
- 0028516855
- D. Leinen, A. Fernandez, J.P. Espinos and A.R. Gonzalez-Elipe, Vacuum, 45 (1994) 1043.
- (1994) Vacuum , vol.45 , pp. 1043
- Leinen, D.¹ Fernandez, A.² Espinos, J.P.³ Gonzalez-Elipe, A.R.⁴

6
- 0028462796
- D.G. Cahill and T.H. Allen, Appl. Phys. Lett., 65 (1994) 309.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 309
- Cahill, D.G.¹ Allen, T.H.²

7
- 0028516346
- P. Lobl, M. Huppertz and D. Mergel, Thin Solid Films, 251 (1994) 72-79.
- (1994) Thin Solid Films , vol.251 , pp. 72-79
- Lobl, P.¹ Huppertz, M.² Mergel, D.³

8
- 0028416345
- D. Leinen, A. Fernandez, J.P. Espinos, T.R. Belderrain and A.R. Gonzalez-Elipe, Thin Solid Films, 241 (1994) 198-201.
- (1994) Thin Solid Films , vol.241 , pp. 198-201
- Leinen, D.¹ Fernandez, A.² Espinos, J.P.³ Belderrain, T.R.⁴ Gonzalez-Elipe, A.R.⁵

9
- 0028400662
- G.A. Battiston, R. Gerbasi, M. Porchia and A. Marigo, Thin Solid Films, 239 (1994) 186-191.
- (1994) Thin Solid Films , vol.239 , pp. 186-191
- Battiston, G.A.¹ Gerbasi, R.² Porchia, M.³ Marigo, A.⁴

10
- 0011011424
- M. Radecka, K.Z. Akrzewska, H. Czternastek, T. Stapinski and S. Debrus, Appl. Surf. Sci., 65/66 (1993) 227-234.
- (1993) Appl. Surf. Sci. , vol.65-66 , pp. 227-234
- Radecka, M.¹ Akrzewska, K.Z.² Czternastek, H.³ Stapinski, T.⁴ Debrus, S.⁵

11
- 0030263036
- N. Martin, C. Rousselot, C. Savall and F. Palmino, Thin Solid Films, 287 (1996) 154.
- (1996) Thin Solid Films , vol.287 , pp. 154
- Martin, N.¹ Rousselot, C.² Savall, C.³ Palmino, F.⁴

12
- 0020940620
- R. Swanepoel, J. Phys. E: Sci. Instrum., 16 (1983) 1214.
- (1983) J. Phys. E: Sci. Instrum. , vol.16 , pp. 1214
- Swanepoel, R.¹

13
- 84957349911
- D. Leinen, J.P. Espinos, A. Fernandez and A.R. Gonzalez-Elipe, J. Vac. Sci. Technol., A, 12 (1994) 2728.
- (1994) J. Vac. Sci. Technol., A , vol.12 , pp. 2728
- Leinen, D.¹ Espinos, J.P.² Fernandez, A.³ Gonzalez-Elipe, A.R.⁴

14
- 0027625927
- L.J. Meng and M.P. Dos Santos, Appl. Surf. Sci., 68 (1993) 319-325.
- (1993) Appl. Surf. Sci. , vol.68 , pp. 319-325
- Meng, L.J.¹ Dos Santos, M.P.²

15
- 0028368703
- H. Tang, K. Prasad, R. Sanjines, P.E. Schmid and F. Levy, J. Appl. Phys., 75 (1994) 2042.
- (1994) J. Appl. Phys. , vol.75 , pp. 2042
- Tang, H.¹ Prasad, K.² Sanjines, R.³ Schmid, P.E.⁴ Levy, F.⁵

16
- 0027579223
- L.J. Meng and M.P. Dos Santos, Thin Solid Films, 226 (1993) 22-29.
- (1993) Thin Solid Films , vol.226 , pp. 22-29
- Meng, L.J.¹ Dos Santos, M.P.²

17
- 0027541413
- L.J. Meng, M. Andritschky and M.P. Dos Santos, Thin Solid Films, 223 (1993) 242-247.
- (1993) Thin Solid Films , vol.223 , pp. 242-247
- Meng, L.J.¹ Andritschky, M.² Dos Santos, M.P.³

18
- 0343103684
- M. Radecka, M. Rekas, H. Czternastek, K. Zakrzewska and S. Debrus, Folia Phys. - Fasciculus, XXXVI (1994) 57.
- (1994) Folia Phys. - Fasciculus , vol.36 , pp. 57
- Radecka, M.¹ Rekas, M.² Czternastek, H.³ Zakrzewska, K.⁴ Debrus, S.⁵

19
- 0028452766
- T. Fujii, N. Sakata, J. Takada, Y. Miura, Y. Daitoh and M. Takano, J. Mater. Res., 9 (1994) 1468.
- (1994) J. Mater. Res. , vol.9 , pp. 1468
- Fujii, T.¹ Sakata, N.² Takada, J.³ Miura, Y.⁴ Daitoh, Y.⁵ Takano, M.⁶

20
- 84957276139
- G.J. Exarhos, J. Vac. Sci. Technol. A, 4 (1986) 2962.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2962
- Exarhos, G.J.¹

21
- 0029371242
- K. Okimura, A. Shibata, N. Maeda, K. Tachibana, Y. Noguchi and K. Tsuchida, Jpn. J. Appl. Phys., 34 (1995) 4950-4955.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 4950-4955
- Okimura, K.¹ Shibata, A.² Maeda, N.³ Tachibana, K.⁴ Noguchi, Y.⁵ Tsuchida, K.⁶

22
- 30244446198
- unpublished work
- K. Okimura, N. Maeda and A. Shibata, unpublished work.
- Okimura, K.¹ Maeda, N.² Shibata, A.³

23
- 0018531692
- J. Szczyrbowski and A. Czapla, J. Phys. D, 12 (1979) 1737.
- (1979) J. Phys. D , vol.12 , pp. 1737
- Szczyrbowski, J.¹ Czapla, A.²

24
- 0028517528
- H. Tang, H. Berger, P.E. Schmid and F. Levy, Solid. State. Commun., 92 (1994) 267-271.
- (1994) Solid. State. Commun. , vol.92 , pp. 267-271
- Tang, H.¹ Berger, H.² Schmid, P.E.³ Levy, F.⁴

25
- 0004283906
- Butterworths, London
- T.S. Moss, Optical Properties of Semiconductors, Butterworths, London, 1959, p. 175.
- (1959) Optical Properties of Semiconductors , pp. 175
- Moss, T.S.¹

26
- 0004071496
- Wiley
- D.K. Schroder, Semiconductor Material and Device Characterization, Wiley, 1990, p. 77.
- (1990) Semiconductor Material and Device Characterization , pp. 77
- Schroder, D.K.¹

27
- 0000838694
- N. Daude, C. Gout and C. Jouanin, Phys. Rev. B, 15 (1977) 3229.
- (1977) Phys. Rev. B , vol.15 , pp. 3229
- Daude, N.¹ Gout, C.² Jouanin, C.³

28
- 0029247602
- K.L. Westra and D.J. Thomson, Thin Solid Films, 257 (1995) 15-21.
- (1995) Thin Solid Films , vol.257 , pp. 15-21
- Westra, K.L.¹ Thomson, D.J.²

29
- 0347417452
- K.L. Westra and D.J. Thomson, J. Vac. Sci. Technol. B, 13 (1995) 344.
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 344
- Westra, K.L.¹ Thomson, D.J.²

30
- 0000573926
- K.L. Westra and D.J. Thomson, J. Vac. Sci. Technol. B, 12 (1994) 3176.
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 3176
- Westra, K.L.¹ Thomson, D.J.²

31
- 0000108983
- A. Szabo and T. Engel, Surf. Sci., 329 (1995) 241-254.
- (1995) Surf. Sci. , vol.329 , pp. 241-254
- Szabo, A.¹ Engel, T.²

32
- 0038813214
- C. Kobusch and J.W. Schultze, Electrochim. Acta, 40 (1995) 1395-1399.
- (1995) Electrochim. Acta , vol.40 , pp. 1395-1399
- Kobusch, C.¹ Schultze, J.W.²

33
- 0000199443
- H. Onishi, F. Fukui and Y. Iwasawa, Bull. Chem. Soc. Jpn., 68 (1995) 2447-2458.
- (1995) Bull. Chem. Soc. Jpn. , vol.68 , pp. 2447-2458
- Onishi, H.¹ Fukui, F.² Iwasawa, Y.³

34
- 0001662971
- P.W. Murray, N.G. Condon and G. Thornton, Phys. Rev. B, 51 (1995) 10 989.
- (1995) Phys. Rev. B , vol.51 , pp. 10989
- Murray, P.W.¹ Condon, N.G.² Thornton, G.³

35
- 0028700036
- P.W. Murray, F.M. Leibsle, C.A. Muryn, H.F. Fischer, C.F.J. Flipse and G. Thornton, Surf. Sci., 321 (1994) 217-228.
- (1994) Surf. Sci. , vol.321 , pp. 217-228
- Murray, P.W.¹ Leibsle, F.M.² Muryn, C.A.³ Fischer, H.F.⁴ Flipse, C.F.J.⁵ Thornton, G.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.