SCOPUS 정보 검색 플랫폼

Volumn 502, Issue 1-2, 2006, Pages 188-192

Investigation of TiO2 based thin films deposited by reactive magnetron sputtering for use at high temperatures

Author keywords

Aluminum oxide; Crystallization; Mixed oxides; Optical coatings; Titanium oxide

Indexed keywords

FILM GROWTH; MAGNETRON SPUTTERING; PHASE TRANSITIONS; REFRACTIVE INDEX; THERMODYNAMIC STABILITY; TITANIUM DIOXIDE;

ANATASE; METALLIC TARGETS; MIXED OXIDES; THERMALLY INDUCED GROWTH;

THIN FILMS;

EID: 33344467981 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.07.272 Document Type: Conference Paper

Times cited : (31)

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