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Applied Physics Letters

Volumn 104, Issue 18, 2014, Pages

Scaled ZrO2 dielectrics for In0.53Ga0.47As gate stacks with low interface trap densities

(4) Chobpattana, Varistha a Mates, Thomas E a Zhang, Jack Y a Stemmer, Susanne a

a Santa Barbara (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84900386680 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4875977 Document Type: Article

Times cited : (22)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.