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Volumn 104, Issue 16, 2014, Pages

Transparent capacitors based on nanolaminate Al2O 3/TiO2/Al2O3 with H2O and O3 as oxidizers

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CAPACITORS; QUARTZ; TITANIUM DIOXIDE;

EID: 84900322239     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4872470     Document Type: Article
Times cited : (31)

References (32)
  • 10
    • 84874246411 scopus 로고    scopus 로고
    • 10.1063/1.4792062
    • P. Ray and V. R. Rao, Appl. Phys. Lett. 102, 064101 (2013). 10.1063/1.4792062
    • (2013) Appl. Phys. Lett. , vol.102 , pp. 064101
    • Ray, P.1    Rao, V.R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.