Al-doped ZnO thin-film transistor embedded micro-cantilever as a piezoresistive sensor

Applied Physics Letters

Volumn 102, Issue 6, 2013, Pages

  Ray, Prasenjit ^a   Ramgopal Rao, V ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AL-DOPED ZNO; DEFLECTION SENSITIVITIES; HIGH STRAINS; LOW YOUNG'S MODULUS; MECHANICAL CHARACTERIZATIONS; MICRO-CANTILEVERS; PIEZO-RESISTIVE SENSORS; RESONANCE FREQUENCIES; SENSING APPLICATIONS; SENSOR APPLICATIONS; SURFACE STRESS;

ELASTIC MODULI; SENSORS; THIN FILM TRANSISTORS; ZINC OXIDE;

NANOCANTILEVERS;

EID: 84874246411     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4792062     Document Type: Article

References (18)

1. J. A. Harley and T. W. Kenny, Appl. Phys. Lett. 75, 289 (1999). 10.1063/1.124350
2. F. J. Giessibl and B. M. Trafas, Rev. Sci. Instrum. 65, 1923 (1994). 10.1063/1.1145232
3. Y. Arntz, J. D. Seelig, H. P. Lang, J. Zhang, P. Hunziker, J. P. Ramseyer, E. Meyer, M. Hegner, and C. Gerber, Nanotechnology 14 (1), 86-90 (2003). 10.1088/0957-4484/14/1/319
4. J. Fritz, J. M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H. Güntherodt, C. Gerber, and J. K. Gimzewski, Science 288 (5464), 316-318 (2000). 10.1126/science.288.5464.316
5. A. Boisen, J. Thaysen, H. Jensenius, and O. Hansen, Ultramicroscopy 82, 11 (2000). 10.1016/S0304-3991(99)00148-5
6. L. T. Chen, C. Y. Lee, and W. H. Cheng, Sens. Actuators, A 147 (2), 522-528 (2008) 10.1016/j.sna.2008.06.033.
7. S.-H. S. Lim, D. Raorane, S. Srinath, and A. Majumdar, Sens. Actuators B 119, 466-474 (2006). 10.1016/j.snb.2006.01.032
8. J. Thaysen, A. D. Yaļcinkaya, P. Vettiger, and A. Menon, J. Phys. D: Appl. Phys. 35, 2698-2703 (2002). 10.1088/0022-3727/35/21/302
9. N. S. Kale, S. Nag, R. Pinto, and V. Ramgopal Rao, J. Microelectromech. Syst. 18, 79-87 (2009). 10.1109/JMEMS.2008.2008577
10. L. Gammelgaard, P. A. Rasmussen, M. Calleja, P. Vettiger, and A. Boisen, Appl. Phys. Lett. 88, 113508 (2006). 10.1063/1.2186396
11. V. Seena, A. Rajorya, A. Fernaundus, K. Dhale, P. Pant, S. Mukherji, and V. Ramgopal Rao, in Proceedings of the 23rd IEEE International Conference on Micro Electro Mechanical Systems, 24-28 January (2010), pp. 851-854.
12. P. Ray, V. Seena, R. A. Khare, A. R. Bhattacharyya, P. R. Apte, and V. Ramgopal Rao, in MRS Proceedings (Cambridge University Press, 2010), Vol. 1299 10.1557/opl.2011.57.
13. V. Seena, A. Fernandes, P. Pant, S. Mukherji, V. Ramgopal Rao, Nanotechnology 22, 295501 (2011). 10.1088/0957-4484/22/29/295501
14. A. Johansson, G. Blagoi, and A. Boisen, Appl. Phys. Lett. 89, 173505 (2006). 10.1063/1.2364843
15. G. Shekhawat, S. H. Tark, and V. P. Dravid, Science 311 (5767), 1592-1595 (2006). 10.1126/science.1122588
16. V. Seena, A. Nigam, P. Pant, S. Mukherji, and V. Ramgopal Rao, J. Microelectromech. Syst. 21 (2), 294-301 (2012). 10.1109/JMEMS.2011.2175703
17. X. Zou, J. P. Xu, P. T. Lai, Y. Li, F. Ji, and L. F. Deng, in Proceedings of IEEE International Conference of EDSSC, 15-17 December 2010 10.1109/EDSSC.2010.5713770.
18. L. C. Lew Yan Voon and M. Willatzen, The K P Method: Electronic Properties of Semiconductors (Springer-Verlag, Berlin, Germany, 2009), p. 12.