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Applied Physics Letters

Volumn 100, Issue 8, 2012, Pages

Low leakage current in metal-insulator-metal capacitors of structural Al 2O 3/TiO 2/Al 2O 3 dielectrics

(4) Woo, Jong Chang a Chun, Yoon Soo a Joo, Young Hee a Kim, Chang Il a

a Chung Ang University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTION MECHANISM; ELECTRICAL TRANSPORT MECHANISMS; FREQUENCY DISPERSION EFFECT; HIGH-CAPACITANCE DENSITY; LOW-LEAKAGE CURRENT; METAL-INSULATOR-METAL CAPACITORS; MIM CAPACITORS;

ALUMINUM; CAPACITORS; TITANIUM DIOXIDE;

MIM DEVICES;

EID: 84863260855 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3687702 Document Type: Article

Times cited : (45)

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