In situ infrared spectroscopic study of atomic layer-deposited TiO 2 thin films by nonaqueous routes

Chemistry of Materials

Volumn 25, Issue 9, 2013, Pages 1706-1712

  Bernal Ramos, Karla ^a   Clavel, Guylhaine ^b   Marichy, Catherine ^b   Cabrera, Wilfredo ^a   Pinna, Nicola ^c   Chabal, Yves J ^a  

^a The University of Texas at Dallas   (United States)

^b UNIVERSITY OF AVEIRO   (Portugal)

^c HUMBOLDT UNIVERSITY   (Germany)

Author keywords

atomic layer deposition; FTIR; nonaqueous sol gel routes; titanium dioxide

Indexed keywords

CARBONATE SPECIES; ESTER ELIMINATIONS; FTIR; INFRARED SPECTROSCOPIC STUDIES; SOL-GEL ROUTES; TITANIUM ALKOXIDES; TITANIUM ISOPROPOXIDE; VIBRATIONAL BANDS;

ACETIC ACID; DEPOSITION; ESTERIFICATION; ESTERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OZONE; PH; PHOTOELECTRONS; REACTION INTERMEDIATES; SOL-GEL PROCESS; SPECTROSCOPIC ANALYSIS; SURFACE REACTIONS; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC LAYER DEPOSITION;

EID: 84877765521     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm400164a     Document Type: Article

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