메뉴 건너뛰기




Volumn 4, Issue 3, 2014, Pages 866-873

Investigation of lifetime-limiting defects after high-temperature phosphorus diffusion in high-iron-content multicrystalline silicon

Author keywords

Dislocation density; iron gettering; minority carrier lifetime; phosphorus diffusion; silicon solar cells

Indexed keywords

DIFFUSION; IRON; POLYSILICON; REFLECTIVE COATINGS; SILICON SOLAR CELLS;

EID: 84899756411     PISSN: 21563381     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPHOTOV.2014.2312485     Document Type: Article
Times cited : (9)

References (39)
  • 1
    • 13644282498 scopus 로고    scopus 로고
    • Transition-metal profiles in a multicrystalline silicon ingot
    • D. Macdonald, A. Cuevas, A. Kinomura, Y. Nakano, and L. J. Geerligs, "Transition-metal profiles in a multicrystalline silicon ingot," J. Appl. Phys., vol. 97, no. 3, pp. 033523-1-033523-7, 2005.
    • (2005) J. Appl. Phys. , vol.97 , Issue.3 , pp. 0335231-0335237
    • Macdonald, D.1    Cuevas, A.2    Kinomura, A.3    Nakano, Y.4    Geerligs, L.J.5
  • 2
    • 0020543433 scopus 로고
    • Transition metals in silicon
    • E. R. Weber, "Transition metals in silicon," Appl. Phys. A, Mater. Sci. Process., vol. 30, no. 1, pp. 1-22, 1983.
    • (1983) Appl. Phys. A, Mater. Sci. Process. , vol.30 , Issue.1 , pp. 1-22
    • Weber, E.R.1
  • 3
    • 84898738134 scopus 로고    scopus 로고
    • Relationships between diffusion parameters and phosphorus precipitation during the POCl3 diffusion process
    • A. Dastgheib-Shirazi, M. Steyer, G. Micard, H. Wagner, P. P. Altermatt, and G. Hahn, "Relationships between diffusion parameters and phosphorus precipitation during the POCl3 diffusion process," Energy Procedia, vol. 28, pp. 254-262, 2013.
    • (2013) Energy Procedia , vol.28 , pp. 254-262
    • Dastgheib-Shirazi, A.1    Steyer, M.2    Micard, G.3    Wagner, H.4    Altermatt, P.P.5    Hahn, G.6
  • 4
    • 0036810463 scopus 로고    scopus 로고
    • Silicon solar-cell processing for minimizing the influence of impurities and defects
    • B. Sopori, "Silicon solar-cell processing for minimizing the influence of impurities and defects," J. Electron. Mater., vol. 31, no. 10, pp. 972-980, 2002. (Pubitemid 35355660)
    • (2002) Journal of Electronic Materials , vol.31 , pp. 972-980
    • Sopori, B.1
  • 6
    • 57049089404 scopus 로고    scopus 로고
    • Effect of iron in silicon feedstock on p-and n-type multicrystalline silicon solar cells
    • G. Coletti, R. Kvande, V. D. Mihailetchi, L. J. Geerligs, L. Arnberg, and E. J. Øvrelid, "Effect of iron in silicon feedstock on p-and n-type multicrystalline silicon solar cells," J. Appl. Phys., vol. 104, no. 10, pp. 104913-1-104913-11, 2008.
    • (2008) J. Appl. Phys. , vol.104 , Issue.10 , pp. 1049131-10491311
    • Coletti, G.1    Kvande, R.2    Mihailetchi, V.D.3    Geerligs, L.J.4    Arnberg, L.5    Øvrelid, E.J.6
  • 7
    • 0032607690 scopus 로고    scopus 로고
    • Modeling of gettering of precipitated impurities from Si for carrier lifetime improvement in solar cell applications
    • P. S. Plekhanov, R. Gafiteanu, U. M. Gösele, and T. Y. Tan, "Modeling of gettering of precipitated impurities from Si for carrier lifetime improvement in solar cell applications," J. Appl. Phys., vol. 86, no. 5, pp. 2453-2458, 1999. (Pubitemid 129308616)
    • (1999) Journal of Applied Physics , vol.86 , Issue.5 , pp. 2453-2458
    • Plekhanov, P.S.1    Gafiteanu, R.2    Gosele, U.M.3    Tan, T.Y.4
  • 8
    • 84870266567 scopus 로고    scopus 로고
    • Iron-rich particles in heavily contaminated multicrystalline silicon wafers and their response to phosphorus gettering
    • D. Macdonald, S. P. Phang, F. E. Rougieux, S. Y. Lim, D. Paterson, D. L. Howard, M. D. de Jonge, and C. G. Ryan, "Iron-rich particles in heavily contaminated multicrystalline silicon wafers and their response to phosphorus gettering," Semicond. Sci. Technol., vol. 27, pp. 125016-1-125016-5, 2012.
    • (2012) Semicond. Sci. Technol. , vol.27 , pp. 1250161-1250165
    • Macdonald, D.1    Phang, S.P.2    Rougieux, F.E.3    Lim, S.Y.4    Paterson, D.5    Howard, D.L.6    De Jonge, M.D.7    Ryan, C.G.8
  • 9
    • 84879351122 scopus 로고    scopus 로고
    • Improved iron gettering of contaminated multicrystalline silicon by high-temperature phosphorus diffusion
    • D. P. Fenning, A. S. Zuschlag, M. I. Bertoni, B. Lai, G. Hahn, and T. Buonassisi, "Improved iron gettering of contaminated multicrystalline silicon by high-temperature phosphorus diffusion," J. Appl. Phys., vol. 113, pp. 214504-1-214504-10, 2013.
    • (2013) J. Appl. Phys. , vol.113 , pp. 2145041-21450410
    • Fenning, D.P.1    Zuschlag, A.S.2    Bertoni, M.I.3    Lai, B.4    Hahn, G.5    Buonassisi, T.6
  • 11
    • 67349120664 scopus 로고    scopus 로고
    • Improving solar grade silicon by controlling extended defect generation and foreign atom defect interactions
    • H. J. Möller, T. Kaden, S. Scholz, and S. Würzner, "Improving solar grade silicon by controlling extended defect generation and foreign atom defect interactions," Appl. Phys. A, vol. 96, no. 1, pp. 207-220, 2009.
    • (2009) Appl. Phys. A , vol.96 , Issue.1 , pp. 207-220
    • Möller, H.J.1    Kaden, T.2    Scholz, S.3    Würzner, S.4
  • 12
    • 22944470090 scopus 로고    scopus 로고
    • Multicrystalline silicon for solar cells
    • DOI 10.1016/j.tsf.2005.01.061, PII S0040609005000908, International Conference on Polycrystalline Semiconductors-Materials, Technologies, Device Applications
    • H. J. Möller, C. Funke, M. Rinio, and S. Scholz, "Multicrystalline silicon for solar cells," Thin Solid Films, vol. 487, no. 1/2, pp. 179-187, 2005. (Pubitemid 41046320)
    • (2005) Thin Solid Films , vol.487 , Issue.1-2 , pp. 179-187
    • Moller, H.J.1    Funke, C.2    Rinio, M.3    Scholz, S.4
  • 13
    • 0036533123 scopus 로고    scopus 로고
    • Oxygen and lattice distortions in multicrystalline silicon
    • DOI 10.1016/S0927-0248(01)00188-X, PII S092702480100188X
    • H. Möller, C. Funke, A. Lawerenz, S. Riedel, and M. Werner, "Oxygen and lattice distortions in multicrystalline silicon," Sol. Energy Mater. Sol. Cells, vol. 72, no. 1, pp. 403-416, 2002. (Pubitemid 34181880)
    • (2002) Solar Energy Materials and Solar Cells , vol.72 , Issue.1-4 , pp. 403-416
    • Moller, H.J.1    Funke, C.2    Lawerenz, A.3    Riedel, S.4    Werner, M.5
  • 14
    • 1642457778 scopus 로고    scopus 로고
    • The trade-off between phosphorus gettering and thermal degradation in multicrystalline silicon
    • Glasgow, U. K., Jun.
    • D. Macdonald and A. Cuevas, "The trade-off between phosphorus gettering and thermal degradation in multicrystalline silicon," in Proc. 16th Eur. Photovoltaic Sol. Energy Conf. Exhib., Glasgow, U. K., Jun. 2000, pp. 1707-1710.
    • (2000) Proc. 16th Eur. Photovoltaic Sol. Energy Conf. Exhib , pp. 1707-1710
    • Macdonald, D.1    Cuevas, A.2
  • 15
    • 6344289454 scopus 로고    scopus 로고
    • Rise of dislocation density in crystalline silicon wafers during diffusion processing
    • Osaka, Japan, May
    • D. Franke, "Rise of dislocation density in crystalline silicon wafers during diffusion processing," in Proc. 3rd World Conf. Photovoltaic Energy Convers., Osaka, Japan, May 2003, pp. 1344-1347.
    • (2003) Proc. 3rd World Conf. Photovoltaic Energy Convers , pp. 1344-1347
    • Franke, D.1
  • 18
    • 67650149312 scopus 로고    scopus 로고
    • Origin of the lowcarrier lifetime edge zone in multicrystalline PV silicon
    • T. U. Naerland, L. Arnberg, and A. Holt, "Origin of the lowcarrier lifetime edge zone in multicrystalline PV silicon," Prog. Photovolt. Res. Appl., vol. 17, no. 5, pp. 289-296, 2009.
    • (2009) Prog. Photovolt. Res. Appl. , vol.17 , Issue.5 , pp. 289-296
    • Naerland, T.U.1    Arnberg, L.2    Holt, A.3
  • 20
    • 0343810768 scopus 로고
    • A new defect etch for polycrystalline silicon
    • B. L. Sopori, "A new defect etch for polycrystalline silicon," J. Electrochem. Soc., vol. 131, no. 3, pp. 667-672, 1984.
    • (1984) J. Electrochem. Soc. , vol.131 , Issue.3 , pp. 667-672
    • Sopori, B.L.1
  • 21
    • 84890216399 scopus 로고    scopus 로고
    • Rapid dislocation-density mapping of as-cut crystalline silicon wafers
    • D. B. Needleman, H. Choi, D. M. Powell, and T. Buonassisi, "Rapid dislocation-density mapping of as-cut crystalline silicon wafers," Phys. Status Solidi (RRL), vol. 7, no. 12, pp. 1041-1044, 2013.
    • (2013) Phys. Status Solidi (RRL) , vol.7 , Issue.12 , pp. 1041-1044
    • Needleman, D.B.1    Choi, H.2    Powell, D.M.3    Buonassisi, T.4
  • 22
    • 84865195858 scopus 로고    scopus 로고
    • Detailed investigation of surface passivation methods for lifetime measurements on p-type silicon wafers
    • Jan.
    • K. L. Pollock, J. Junge, and G. Hahn, "Detailed investigation of surface passivation methods for lifetime measurements on p-type silicon wafers," IEEE J. Photovoltaics, vol. 2, no. 1, pp. 1-6, Jan. 2012.
    • (2012) IEEE J. Photovoltaics , vol.2 , Issue.1 , pp. 1-6
    • Pollock, K.L.1    Junge, J.2    Hahn, G.3
  • 23
    • 33748292849 scopus 로고    scopus 로고
    • The influence of structural defects on phosphorus diffusion in multicrystalline silicon
    • DOI 10.1016/j.solmat.2006.06.020, PII S0927024806002376
    • A. Bentzen, B. G. Svensson, E. S. Marstein, and A. Holt, "The influence of structural defects on phosphorus diffusion in multicrystalline silicon," Sol. Energy Mater. Sol. Cells, vol. 90, no. 18/19, pp. 3193-3198, 2006. (Pubitemid 44332102)
    • (2006) Solar Energy Materials and Solar Cells , vol.90 , Issue.18-19 , pp. 3193-3198
    • Bentzen, A.1    Svensson, B.G.2    Marstein, E.S.3    Holt, A.4
  • 26
    • 0141886883 scopus 로고    scopus 로고
    • Averaging of laterally inhomogeneous lifetimes for one-dimensional modeling of solar cells
    • J. Isenberg, J. Dicker, and W. Warta, "Averaging of laterally inhomogeneous lifetimes for one-dimensional modeling of solar cells," J. Appl. Phys., vol. 94, no. 6, pp. 4122-4130, 2003.
    • (2003) J. Appl. Phys. , vol.94 , Issue.6 , pp. 4122-4130
    • Isenberg, J.1    Dicker, J.2    Warta, W.3
  • 28
    • 84882272907 scopus 로고    scopus 로고
    • A simple criterion for predicting multicrystalline Si solar cell performance from lifetime images of wafers prior to cell production
    • H. Wagner, M. Müller, G. Fischer, and P. P. Altermatt, "A simple criterion for predicting multicrystalline Si solar cell performance from lifetime images of wafers prior to cell production," J. Appl. Phys., vol. 114, no. 5, pp. 054501-1-054501-8, 2013.
    • (2013) J. Appl. Phys. , vol.114 , Issue.5 , pp. 0545011-0545018
    • Wagner, H.1    Müller, M.2    Fischer, G.3    Altermatt, P.P.4
  • 29
    • 42149093175 scopus 로고    scopus 로고
    • Imaging interstitial iron concentrations in boron-doped crystalline silicon using photoluminescence
    • D. Macdonald, J. Tan, and T. Trupke, "Imaging interstitial iron concentrations in boron-doped crystalline silicon using photoluminescence," J. Appl. Phys., vol. 103, no. 7, pp. 073710-1-073710-7, 2008.
    • (2008) J. Appl. Phys. , vol.103 , Issue.7 , pp. 0737101-0737107
    • Macdonald, D.1    Tan, J.2    Trupke, T.3
  • 30
    • 67650782991 scopus 로고    scopus 로고
    • Photoconductance-calibrated photoluminescence lifetime imaging of crystalline silicon
    • S. Herlufsen, J. Schmidt, D. Hinken, K. Bothe, and R. Brendel, "Photoconductance-calibrated photoluminescence lifetime imaging of crystalline silicon," Physica Status Solidi RRL, vol. 2, no. 6, pp. 245-247, 2008.
    • (2008) Physica Status Solidi RRL , vol.2 , Issue.6 , pp. 245-247
    • Herlufsen, S.1    Schmidt, J.2    Hinken, D.3    Bothe, K.4    Brendel, R.5
  • 32
    • 33646878594 scopus 로고    scopus 로고
    • Gettering of transition metal impurities during phosphorus emitter diffusion in multicrystalline silicon solar cell processing
    • A. Bentzen, A. Holt, R. Kopecek, G. Stokkan, J. S. Christensen, and B. G. Svensson, "Gettering of transition metal impurities during phosphorus emitter diffusion in multicrystalline silicon solar cell processing," J. Appl. Phys., vol. 99, no. 9, pp. 093509-1-093509-6, 2006.
    • (2006) J. Appl. Phys. , vol.99 , Issue.9 , pp. 0935091-0935096
    • Bentzen, A.1    Holt, A.2    Kopecek, R.3    Stokkan, G.4    Christensen, J.S.5    Svensson, B.G.6
  • 33
    • 67349241915 scopus 로고    scopus 로고
    • Overview of phosphorus diffusion and gettering in multicrystalline silicon
    • A. Bentzen and A. Holt, "Overview of phosphorus diffusion and gettering in multicrystalline silicon," Mater. Sci. Eng. B, vol. 159, pp. 228-234, 2009.
    • (2009) Mater. Sci. Eng. B , vol.159 , pp. 228-234
    • Bentzen, A.1    Holt, A.2
  • 34
    • 77957653652 scopus 로고    scopus 로고
    • Quality control of as-cut multicrystalline silicon wafers using photoluminescence imaging for solar cell production
    • J. Haunschild, M. Glatthaar, M. Demant, J. Nievendick, M. Motzko, S. Rein, and E. R. Weber, "Quality control of as-cut multicrystalline silicon wafers using photoluminescence imaging for solar cell production," Sol. Energy Mater. Sol. Cells, vol. 94, no. 12, pp. 2007-2012, 2010.
    • (2010) Sol. Energy Mater. Sol. Cells , vol.94 , Issue.12 , pp. 2007-2012
    • Haunschild, J.1    Glatthaar, M.2    Demant, M.3    Nievendick, J.4    Motzko, M.5    Rein, S.6    Weber, E.R.7
  • 37
    • 84867575492 scopus 로고    scopus 로고
    • High temperature annealing of bent multicrystalline silicon rods
    • T. Ervik, M. Kivambe, G. Stokkan, B. Ryningen, and O. Lohne, "High temperature annealing of bent multicrystalline silicon rods," Acta Materialia, vol. 60, no. 19, pp. 6762-6769, 2012.
    • (2012) Acta Materialia , vol.60 , Issue.19 , pp. 6762-6769
    • Ervik, T.1    Kivambe, M.2    Stokkan, G.3    Ryningen, B.4    Lohne, O.5
  • 38
    • 0000479232 scopus 로고    scopus 로고
    • Dislocation motion in the presence of diffusing solutes: A computer simulation study
    • Y. Wang, D. J. Srolovitz, J. M. Rickman, and R. Lesar, "Dislocation motion in the presence of diffusing solutes: A computer simulation study," Acta Materialia, vol. 48, no. 9, pp. 2163-2175, 2000.
    • (2000) Acta Materialia , vol.48 , Issue.9 , pp. 2163-2175
    • Wang, Y.1    Srolovitz, D.J.2    Rickman, J.M.3    Lesar, R.4
  • 39
    • 0020114462 scopus 로고
    • Recovery of dislocation structures in plastically deformed copper and nickel single crystals
    • DOI 10.1016/0001-6160(82)90080-3
    • F. Prinz, A. S. Argon, and W. C. Moffatt, "Recovery of dislocation structures in plastically deformed copper and nickel single crystals," Acta Metallurgica, vol. 30, no. 4, pp. 821-830, 1982. (Pubitemid 12513502)
    • (1982) Acta Metallurgica , vol.30 , Issue.4 , pp. 821-830
    • Prinz, F.1    Argon, A.S.2    Moffatt, W.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.