SCOPUS 정보 검색 플랫폼

Journal of Electronic Materials

Volumn 43, Issue 2, 2014, Pages 555-566

Low-temperature silicon-to-silicon anodic bonding using sodium-rich glass for MEMS applications

(2) Tiwari, Ruchi a Chandra, Sudhir a

a INDIAN INSTITUTE OF TECHNOLOGY DELHI (India)

Author keywords

bonding energy; crack opening method; RF sputtering; silicon to silicon anodic bonding; sodium rich glass thin film

Indexed keywords

CAPACITIVE SENSORS; CHEMICAL BONDS; CHEMICAL MECHANICAL POLISHING; CHEMICAL SENSORS; CRACKS; FABRY-PEROT INTERFEROMETERS; GLASS; GLASS BONDING; METAL IONS; PRESSURE SENSORS; SCANNING ELECTRON MICROSCOPY; SODIUM; SPUTTERING; STRESS INTENSITY FACTORS; SURFACE ROUGHNESS; TEMPERATURE; THIN FILMS; WAFER BONDING;

ANODIC BONDING; BONDING ENERGIES; CRACK OPENING; GLASS THIN FILMS; RF-SPUTTERING;

SILICON WAFERS;

EID: 84897636431 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-013-2844-0 Document Type: Article

Times cited : (7)

References (39)

1
- 0004050161
- New York: Wiley
- Q.Y. Tong and U. Gosele, Semiconductor Wafer Bonding Science & Technology (New York: Wiley, 1999).
- (1999) Semiconductor Wafer Bonding Science & Technology
- Tong, Q.Y.¹ Gosele, U.²

2
- 0037438986
- 10.1016/S0924-4247(02)00329-1
- A. Ayon, X. Zhang, K. Turner, D. Choi, B. Miller, S.F. Nagle, and S.M. Spearing, Sensors Actuators A 103, 1 (2003).
- (2003) Sensors Actuators A , vol.103 , pp. 1
- Ayon, A.¹ Zhang, X.² Turner, K.³ Choi, D.⁴ Miller, B.⁵ Nagle, S.F.⁶ Spearing, S.M.⁷

3
- 0032136370
- 10.1109/5.704262
- M.A. Schmidt, IEEE Proc. 86, 1575 (1998).
- (1998) IEEE Proc. , vol.86 , pp. 1575
- Schmidt, M.A.¹

4
- 0024129796
- Hilton Head
- K. Petersen, P. Barth, J. Poydock, J. Brown, J. Mallon, and J. Bryzek, IEEE Solid State Sensor and Actuator Workshop, Hilton Head, 1988, p. 144.
- (1988) IEEE Solid State Sensor and Actuator Workshop , pp. 144
- Petersen, K.¹ Barth, P.² Poydock, J.³ Brown, J.⁴ Mallon, J.⁵ Bryzek, J.⁶

5
- 0032162663
- 10.1109/84.709646
- X. Jin, I. Ladabaum, and B.T. Khuri-Yakub, J. Microelectromech. Syst. 7, 295 (1998).
- (1998) J. Microelectromech. Syst. , vol.7 , pp. 295
- Jin, X.¹ Ladabaum, I.² Khuri-Yakub, B.T.³

6
- 0343688960
- San Francisco
- M.A. Huff, A.D. Nikolich, and M.A. Schmidt, International Conference on Solid State Sensors and Actuators, San Francisco, 1991, p. 177.
- (1991) International Conference on Solid State Sensors and Actuators , pp. 177
- Huff, M.A.¹ Nikolich, A.D.² Schmidt, M.A.³

7
- 0037387686
- 10.1109/JMEMS.2003.809968
- Y. Huang, A.S. Ergun, E. Haeggstrom, M.H. Badi, and B.T. Khuri-Yakub, J. Microelectromech. Syst. 12, 128 (2003).
- (2003) J. Microelectromech. Syst. , vol.12 , pp. 128
- Huang, Y.¹ Ergun, A.S.² Haeggstrom, E.³ Badi, M.H.⁴ Khuri-Yakub, B.T.⁵

8
- 0027609536
- 10.1109/84.232603
- M.A. Huff, A.D. Nikolich, and M.A. Schmidt, J. Microelectromech. Syst. 2, 74 (1993).
- (1993) J. Microelectromech. Syst. , vol.2 , pp. 74
- Huff, M.A.¹ Nikolich, A.D.² Schmidt, M.A.³

9
- 33144457177
- L. Ming and M. Wang, Opt. Express 14, 1497 (2006).
- (2006) Opt. Express , vol.14 , pp. 1497
- Ming, L.¹ Wang, M.²

10
- 0024141314
- Hilton Head
- P.W. Barth, F. Pourahmadi, R. Mayer, J. Poydock, and K. Petersen, IEEE Solid State Sensor and Actuator Workshop, Hilton Head, 1988, p. 35.
- (1988) IEEE Solid State Sensor and Actuator Workshop , pp. 35
- Barth, P.W.¹ Pourahmadi, F.² Mayer, R.³ Poydock, J.⁴ Petersen, K.⁵

11
- 0024134740
- Hilton Head
- S. Terry, IEEE Solid State Sensor and Actuator Workshop, Hilton Head, 1988, p. 114.
- (1988) IEEE Solid State Sensor and Actuator Workshop , pp. 114
- Terry, S.¹

12
- 33947423949
- 10.1109/JPROC.2006.886026
- S.H. Christiansen and U.G. Rajendra Singh, Proc. IEEE 94, 2060 (2006).
- (2006) Proc. IEEE , vol.94 , pp. 2060
- Christiansen, S.H.¹ Rajendra Singh, U.G.²

13
- 0042441501
- 10.1016/S0924-4247(98)00130-7
- S. Weichel, R.D. Reus, and M. Lindahl, Sensors Actuators A 70, 179 (1998).
- (1998) Sensors Actuators A , vol.70 , pp. 179
- Weichel, S.¹ Reus, R.D.² Lindahl, M.³

14
- 0037342834
- 10.1088/0960-1317/13/2/308
- J. Wei, H. Xie, M.L. Nai, C.K. Wong, and L.C. Lee, J. Micromech. Microeng. 13, 217 (2003).
- (2003) J. Micromech. Microeng. , vol.13 , pp. 217
- Wei, J.¹ Xie, H.² Nai, M.L.³ Wong, C.K.⁴ Lee, L.C.⁵

15
- 0035280357
- 10.1016/S0924-4247(00)00537-9
- D. Lee, Y. Lee, J. Jang, and B. Ju, Sensors Actuators A 89, 43 (2001).
- (2001) Sensors Actuators A , vol.89 , pp. 43
- Lee, D.¹ Lee, Y.² Jang, J.³ Ju, B.⁴

16
- 33644949327
- 10.1063/1.342443
- P.W. Maszara, G. Goetz, A. Caviglia, and J.B. Mckitterick, J. Appl. Phys. 64, 4943 (1988).
- (1988) J. Appl. Phys. , vol.64 , pp. 4943
- Maszara, P.W.¹ Goetz, G.² Caviglia, A.³ McKitterick, J.B.⁴

17
- 0004222746
- chap. 6 (Boston, London: Artech House
- L. Ristic: Sensor Technology and Devices, chap. 6 (Boston, London: Artech House, 1994), p. 210.
- (1994) Sensor Technology and Devices , pp. 210
- Ristic, L.¹

18
- 0000935967
- 10.1116/1.589603
- W.B. Choi, B.K. Ju, Y.H. Lee, M.R. Haskard, and M.Y. Sung, et al., J. Vacuum Sci. Technol. B 17, 477 (1997).
- (1997) J. Vacuum Sci. Technol. B , vol.17 , pp. 477
- Choi, W.B.¹ Ju, B.K.² Lee, Y.H.³ Haskard, M.R.⁴ Sung, M.Y.⁵

19
- 0014563672
- 10.1063/1.1657121
- G. Wallis and D.I. Pomerantz, J. Appl. Phys. 40, 3946 (1969).
- (1969) J. Appl. Phys. , vol.40 , pp. 3946
- Wallis, G.¹ Pomerantz, D.I.²

20
- 0033732615
- 10.1016/S0924-4247(99)00372-6
- S. Weichel, R.D. Reus, S. Bouaidat, P.A. Rasmussen, O. Hansen, K. Birkelund, and H. Dirac, Sensors Actuators A 82, 249 (2000).
- (2000) Sensors Actuators A , vol.82 , pp. 249
- Weichel, S.¹ Reus, R.D.² Bouaidat, S.³ Rasmussen, P.A.⁴ Hansen, O.⁵ Birkelund, K.⁶ Dirac, H.⁷

21
- 0004409820
- 10.1007/s005420050154
- A. Gerlach, D. Maas, D. Seidel, H. Bartuch, S. Schundau, and K. Kaschlik, Microsyst. Technol. 5, 144 (1999).
- (1999) Microsyst. Technol. , vol.5 , pp. 144
- Gerlach, A.¹ Maas, D.² Seidel, D.³ Bartuch, H.⁴ Schundau, S.⁵ Kaschlik, K.⁶

22
- 0026225616
- 10.1088/0960-1317/1/3/002
- A. Hanneborg, M. Nese, and P. Bhlckers, J. Micromech. Microeng. 1, 138 (1991).
- (1991) J. Micromech. Microeng. , vol.1 , pp. 138
- Hanneborg, A.¹ Nese, M.² Bhlckers, P.³

23
- 0000707524
- 10.1149/1.2404250
- A.D. Brooks, R.P. Donovan, and C.A. Hardesty, J. Electrochem. Soc. 119, 545 (1972).
- (1972) J. Electrochem. Soc. , vol.119 , pp. 545
- Brooks, A.D.¹ Donovan, R.P.² Hardesty, C.A.³

24
- 0031339460
- 10.1088/0960-1317/7/4/007
- W.B. Choi, B.K. Ju, Y.H. Lee, J.W. Jeong, M.R. Haskard, N.Y. Lee, M.Y. Sung, and M.H. Oh, J. Micromech. Microeng. 7, 316 (1997).
- (1997) J. Micromech. Microeng. , vol.7 , pp. 316
- Choi, W.B.¹ Ju, B.K.² Lee, Y.H.³ Jeong, J.W.⁴ Haskard, M.R.⁵ Lee, N.Y.⁶ Sung, M.Y.⁷ Oh, M.H.⁸

25
- 63049096799
- 10.1016/j.sna.2009.01.018
- P. Mrozek, Sensors Actuators A 151, 77 (2009).
- (2009) Sensors Actuators A , vol.151 , pp. 77
- Mrozek, P.¹

26
- 0031276488
- 10.1016/S0254-0584(97)80289-1
- S. Gen, H. Fukunaga, T. Suga, and K. Tanaka, Mater. Chem. Phys. 51, 174 (1997).
- (1997) Mater. Chem. Phys. , vol.51 , pp. 174
- Gen, S.¹ Fukunaga, H.² Suga, T.³ Tanaka, K.⁴

27
- 0034297824
- T.M.H. Lee, D.H.Y. Lee, C.Y.N. Liaw, A.I.K. Lao, and I.-M. Hsing: Sensors Actuators A. 86, 103 (2000).
- (2000) Sensors Actuators A. , vol.86 , pp. 103
- Lee, T.M.H.¹ Lee, D.H.Y.² Liaw, C.Y.N.³ Lao, A.I.K.⁴ Hsing, I.-M.⁵

28
- 0029325927
- 10.1088/0960-1317/5/2/010
- A. Cozma and B. Puers, J. Micromech. Microeng. 5, 98 (1995).
- (1995) J. Micromech. Microeng. , vol.5 , pp. 98
- Cozma, A.¹ Puers, B.²

29
- 50949087052
- 10.1016/j.microrel.2008.04.016
- Y.Q. Hu, Y.P. Zhao, and T. Yu, Microelectron. Reliab. 48, 1720 (2008).
- (2008) Microelectron. Reliab. , vol.48 , pp. 1720
- Hu, Y.Q.¹ Zhao, Y.P.² Yu, T.³

30
- 0025414977
- M. Esashi, A. Nakano, S. Shoji, and H. Hebiguchi: Sensors Actuators A 21, 931 (1990).
- (1990) Sensors Actuators A , vol.21 , pp. 931
- Esashi, M.¹ Nakano, A.² Shoji, S.³ Hebiguchi, H.⁴

31
- 4544261833
- 10.1016/j.sna.2004.04.029
- G.S. Chung and J.M. Kim, Sensors Actuators A 116, 352 (2004).
- (2004) Sensors Actuators A , vol.116 , pp. 352
- Chung, G.S.¹ Kim, J.M.²

32
- 68949155533
- 10.1007/s11664-009-0846-8
- V. Bhatt and S. Chandra, J. Electron. Mater. 38, 1979 (2009).
- (2009) J. Electron. Mater. , vol.38 , pp. 1979
- Bhatt, V.¹ Chandra, S.²

33
- 33744530264
- 10.1088/1742-6596/34/1/156
- J. Wei, J. Phys. Conf. Ser. 34, 943 (2006).
- (2006) J. Phys. Conf. Ser. , vol.34 , pp. 943
- Wei, J.¹

34
- 79958112482
- 10.1016/j.tsf.2011.02.074
- A.V. Singh, S. Chandra, and G. Bose, Thin Solid Films 519, 5846 (2011).
- (2011) Thin Solid Films , vol.519 , pp. 5846
- Singh, A.V.¹ Chandra, S.² Bose, G.³

35
- 34247498636
- 10.1088/0960-1317/17/5/029
- V. Bhatt and S. Chandra, J. Micromech. Microeng. 17, 1066 (2007).
- (2007) J. Micromech. Microeng. , vol.17 , pp. 1066
- Bhatt, V.¹ Chandra, S.²

36
- 59749104873
- 10.1016/j.jcrysgro.2008.09.046
- Z. Vashaei, T. Aikawa, M. Ohtsuka, H. Kobatake, H. Fukuyama, S. Ikeda, and K. Takada, J. Cryst. Growth 311, 459 (2009).
- (2009) J. Cryst. Growth , vol.311 , pp. 459
- Vashaei, Z.¹ Aikawa, T.² Ohtsuka, M.³ Kobatake, H.⁴ Fukuyama, H.⁵ Ikeda, S.⁶ Takada, K.⁷

37
- 0029600563
- 10.1016/0042-207X(95)00158-1
- M.F. Cerqueira, M. Andritschky, L. Rebouta, J.A. Ferreira, and M.F. Dasilva, Vacuum 46, 1385 (1995).
- (1995) Vacuum , vol.46 , pp. 1385
- Cerqueira, M.F.¹ Andritschky, M.² Rebouta, L.³ Ferreira, J.A.⁴ Dasilva, M.F.⁵

38
- 29044440856
- 10.2320/matertrans.46.2246
- T. Narushima, K. Ueda, T. Goto, H. Masumoto, T. Katsube, H. Kawamura, C. Ouchi, and Y. Iguchi, Mater. Trans. 46, 2246 (2005).
- (2005) Mater. Trans. , vol.46 , pp. 2246
- Narushima, T.¹ Ueda, K.² Goto, T.³ Masumoto, H.⁴ Katsube, T.⁵ Kawamura, H.⁶ Ouchi, C.⁷ Iguchi, Y.⁸

39
- 0000073841
- 10.1098/rspa.1909.0021
- G.G. Stoney, Electrolysis Proc. R. Soc. A 82, 172 (2012).
- (2012) Electrolysis Proc. R. Soc. A , vol.82 , pp. 172
- Stoney, G.G.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.