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Volumn 151, Issue 1, 2009, Pages 77-80

Anodic bonding of glasses with interlayers for fully transparent device applications

Author keywords

Anodic bonding; Field assisted sealing; Multilayer structure; Thin film

Indexed keywords

APPLICATIONS; COMPOSITE FILMS; ELECTRIC RESISTANCE; FILM PREPARATION; GLASS; MULTILAYERS; SEMICONDUCTING FILMS; THIN FILM DEVICES; TITANIUM; VACUUM; VACUUM DEPOSITION;

EID: 63049096799     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.01.018     Document Type: Article
Times cited : (16)

References (9)
  • 1
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    • Field assisted glass-metal sealing
    • Wallis G., and Pomerantz D.I. Field assisted glass-metal sealing. J. Appl. Phys. 40 (1969) 3946-3949
    • (1969) J. Appl. Phys. , vol.40 , pp. 3946-3949
    • Wallis, G.1    Pomerantz, D.I.2
  • 3
    • 20444468850 scopus 로고    scopus 로고
    • The anodic bonding between K4 glass and Si
    • Yu P., Pan Ch., and Xue J. The anodic bonding between K4 glass and Si. Mater. Lett. 59 (2005) 2492-2495
    • (2005) Mater. Lett. , vol.59 , pp. 2492-2495
    • Yu, P.1    Pan, Ch.2    Xue, J.3
  • 5
    • 33947531758 scopus 로고    scopus 로고
    • Fabrication of self-sealed circular nano/microfluidic channels in glass substrates
    • Wong C.C., Agarwal A., Balasubramanian N., and Kwong D.L. Fabrication of self-sealed circular nano/microfluidic channels in glass substrates. Nanotechnology 18 (2007) 135304
    • (2007) Nanotechnology , vol.18 , pp. 135304
    • Wong, C.C.1    Agarwal, A.2    Balasubramanian, N.3    Kwong, D.L.4
  • 6
    • 34047102832 scopus 로고    scopus 로고
    • A microfluidic device for impedance spectroscopy analysis of biological samples
    • Iliescu C., Poenar D.P., Carp M., and Loe F.C. A microfluidic device for impedance spectroscopy analysis of biological samples. Sens. Actuators B Chem. 123 (2007) 168-176
    • (2007) Sens. Actuators B Chem. , vol.123 , pp. 168-176
    • Iliescu, C.1    Poenar, D.P.2    Carp, M.3    Loe, F.C.4
  • 7
    • 23344449807 scopus 로고    scopus 로고
    • Integrating micromachined fast response temperature sensor array in a glass microchannel
    • Xue Z., and Qiu H. Integrating micromachined fast response temperature sensor array in a glass microchannel. Sensor Actuat. A Phys. 122 (2005) 189-195
    • (2005) Sensor Actuat. A Phys. , vol.122 , pp. 189-195
    • Xue, Z.1    Qiu, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.