Optical MEMS pressure sensor based on Fabry-Perot interferometry

Optics Express

Volumn 14, Issue 4, 2006, Pages 1497-1504

  Li, Ming ^a   Wang, Ming ^a   Li, Hongpu ^b  

^a NANJING NORMAL UNIVERSITY   (China)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FABRY-PEROT INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; SIGNAL PROCESSING;

OPTICAL SIGNALS; PRESSURE SENSORS; SPECTRUM SHIFT;

OPTICAL SENSORS;

EID: 33144457177     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.001497     Document Type: Article

References (13)

1. R. A. Wolthuis, "Development of medical pressure and temperature sensors employing optical spectrum modulation," IEEE Trans. Biomed. Eng. 38, 974-981 (1991).
2. Y. Kim and D. P. Neikirk, "Micromachined Fabry-Perot cavity pressure transducer," IEEE Photonics Technol. Lett. 7, 1471-1473 (1995).
3. D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photonics Technol. Lett. 13, 993-995 (2001).
4. J. Han, J. Y. Kim, T. S. Kim, and J. S. Kim, "Performance of Fabry-Perot microcavity structures with corrugated diaphragms," Sens. Actuators A 79, 162-72 (2000).
5. W. J. Wang, R. M. Lin, T. T. Sun, D. G. Guo, and Y. Ren, "Performance enhanced Fabry-Perot microcavity structure with a novel non-planar diaphragm," Microelectron. Eng. 70, 102-108 (2003).
6. W. J. Wang, R. M. Lin, D. G. Guo, and T. T. Sun, "Development of a novel Fabry-Perot pressure microsensor," Sens. Actuators A 116, 59-65 (2004).
7. W. Li, D. C. Abeysinghe, and J. T. Boyd, "Wavelength multiplexing of MEMS pressure and temperature sensors using fiber Bragg gratings and arrayed waveguide gratings," Opt. Eng. 42, 431-438 (2003).
8. J. Zhou, and S. Dasgupta, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
9. L. Landeau and L. Lifschitz, Theory of Elasticity (Pergamon 1970).
10. M. Born and E. Wolf, Principles of Optics (Pergamon Press, Oxford, 1980).
11. M.Wang and G. Lai, "Self-mixing microscopic interferometer for the measurement of microprofile," Opt. Commun. 23, 237-244 (2004).
12. H. Hai and M.Wang, "Theory and experiment study on self-mixing interference with multiple external reflectors," Chin. J. Laser. 31, 1373-1377 (2004).
13. Y. Rao, "In-fibre Bragg grating sensors," Meas. Sci. Technol. 8, 355-375 (1997).