메뉴 건너뛰기




Volumn 20, Issue 4-5, 2014, Pages 523-531

High temperature stability of electrically conductive Pt-Rh/ZrO2 and Pt-Rh/HfO2 nanocomposite thin film electrodes

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; AGGLOMERATION; ATOMIC LAYER DEPOSITION; CONDUCTIVE FILMS; ELECTRODES; GALLIUM; GALLIUM ALLOYS; GRAIN GROWTH; HAFNIUM OXIDES; NANOCOMPOSITE FILMS; RHODIUM; SENSORS; SUBSTRATES; ULTRASONIC TRANSDUCERS; X RAY DIFFRACTION;

EID: 84897515183     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-013-1974-x     Document Type: Conference Paper
Times cited : (47)

References (30)
  • 1
    • 0013356727 scopus 로고    scopus 로고
    • Thermodynamics of tetragonal zirconia formation in a nanolaminate film
    • 10.1063/1.360902
    • Aita CR, Wiggins MD, Whig R, Scanlan CM (1996) Thermodynamics of tetragonal zirconia formation in a nanolaminate film. J Appl Phys 79:1176-1178
    • (1996) J Appl Phys , vol.79 , pp. 1176-1178
    • Aita, C.R.1    Wiggins, M.D.2    Whig, R.3    Scanlan, C.M.4
  • 2
    • 79953101798 scopus 로고    scopus 로고
    • High-temperature battery-free wireless microwave acoustic resonator sensor system
    • 10.1049/el.2010.0462
    • Canabal A, Davulis PM, Harris GM, Pereira da Cunha M (2010) High-temperature battery-free wireless microwave acoustic resonator sensor system. Electron Lett 46:471-472
    • (2010) Electron Lett , vol.46 , pp. 471-472
    • Canabal, A.1    Davulis, P.M.2    Harris, G.M.3    Pereira Da Cunha, M.4
  • 3
    • 38849098322 scopus 로고    scopus 로고
    • Reliability improvement of suspended platinum-based micro-heating elements
    • 10.1016/j.sna.2007.04.006
    • Courbat J, Briand D, de Rooij NF (2008) Reliability improvement of suspended platinum-based micro-heating elements. Sens Actuators A 142:284-291
    • (2008) Sens Actuators A , vol.142 , pp. 284-291
    • Courbat, J.1    Briand, D.2    De Rooij, N.F.3
  • 4
    • 84857822425 scopus 로고    scopus 로고
    • Determination and experimental verification of high-temperature SAW orientations on langatate
    • 10.1109/TUFFC.2012.2189
    • Davulis PM, Pereira da Cunha M (2012) Determination and experimental verification of high-temperature SAW orientations on langatate. IEEE Trans Ultr Ferr Freq Contr 59:287-411
    • (2012) IEEE Trans Ultr Ferr Freq Contr , vol.59 , pp. 287-411
    • Davulis, P.M.1    Pereira Da Cunha, M.2
  • 5
    • 0032023866 scopus 로고    scopus 로고
    • Investigation of high-temperature degradation of platinum thin films with in situ resistance measurement apparatus
    • 10.1109/84.661395
    • Firebaugh SL, Jensen KF, Schmidt MA (1998) Investigation of high-temperature degradation of platinum thin films with in situ resistance measurement apparatus. J. Microelectromech Syst 7:128-135
    • (1998) J. Microelectromech Syst , vol.7 , pp. 128-135
    • Firebaugh, S.L.1    Jensen, K.F.2    Schmidt, M.A.3
  • 7
    • 21544454515 scopus 로고
    • Stabilization of the tetragonal structure in zirconia monocrystals
    • 10.1021/j100491a016
    • Garvie RC (1978) Stabilization of the tetragonal structure in zirconia monocrystals. J Phys Chem 82:218-224
    • (1978) J Phys Chem , vol.82 , pp. 218-224
    • Garvie, R.C.1
  • 8
    • 27744443670 scopus 로고    scopus 로고
    • Ceramic temperature sensors for harsh environments
    • 10.1109/JSEN.2005.844346
    • Gregory OJ, You T (2005) Ceramic temperature sensors for harsh environments. IEEE Sens J 5:833-838
    • (2005) IEEE Sens J , vol.5 , pp. 833-838
    • Gregory, O.J.1    You, T.2
  • 9
    • 33748614600 scopus 로고    scopus 로고
    • Advanced high-k dielectric stacks with poly Si and metal gates: Recent progress and current challenges
    • 10.1147/rd.504.0387
    • Gusev EP, Narayanan V, Frank MM (2006) Advanced high-k dielectric stacks with poly Si and metal gates: recent progress and current challenges. IBM J Res Dev 50:387-410
    • (2006) IBM J Res Dev , vol.50 , pp. 387-410
    • Gusev, E.P.1    Narayanan, V.2    Frank, M.M.3
  • 11
    • 33845256627 scopus 로고    scopus 로고
    • High-performance ultrathin solid oxide fuel cells for low-temperature operation
    • 10.1149/1.2372592
    • Huang H, Nakamura M, Su P, Fasching R, Saito Y, Prinz FB (2007) High-performance ultrathin solid oxide fuel cells for low-temperature operation. J Electrochem Soc 154:B20-B24
    • (2007) J Electrochem Soc , vol.154
    • Huang, H.1    Nakamura, M.2    Su, P.3    Fasching, R.4    Saito, Y.5    Prinz, F.B.6
  • 12
    • 1642578899 scopus 로고    scopus 로고
    • An overview of high temperature electronics and sensor development at NASA Glenn Research Center
    • 10.1115/1.1579508
    • Hunter GW, Neudeck PG, Okojie RS, Beheim GM, Powell JA (2003) An overview of high temperature electronics and sensor development at NASA Glenn Research Center. J. Turbomachinery 125:658-664
    • (2003) J. Turbomachinery , vol.125 , pp. 658-664
    • Hunter, G.W.1    Neudeck, P.G.2    Okojie, R.S.3    Beheim, G.M.4    Powell, J.A.5
  • 13
    • 78650510555 scopus 로고    scopus 로고
    • 1.92/Pt thin film solid oxide fuel cells: Electrode microstructure and stability considerations
    • 10.1016/j.jpowsour.2010.10.068
    • 1.92/Pt thin film solid oxide fuel cells: electrode microstructure and stability considerations. J Power Sources 196:2608-2614
    • (2011) J Power Sources , vol.196 , pp. 2608-2614
    • Kerman, K.1    Lai, B.K.2    Ramanathan, S.3
  • 14
    • 70350625262 scopus 로고    scopus 로고
    • A high-temperature MEMS heater using suspended silicon structures
    • 10.1088/0960-1317/19/11/115011
    • Lee KN, Lee DS, Jung SW, Jang YH, Kim YK, Seong WK (2009) A high-temperature MEMS heater using suspended silicon structures. J Micromech Microeng 19:115011-115018
    • (2009) J Micromech Microeng , vol.19 , pp. 115011-115018
    • Lee, K.N.1    Lee, D.S.2    Jung, S.W.3    Jang, Y.H.4    Kim, Y.K.5    Seong, W.K.6
  • 16
    • 84864614347 scopus 로고    scopus 로고
    • MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1000°C
    • 10.1007/s00542-012-1441-0
    • Miyakawa N, Legner W, Ziemann T, Telitschkin D, Fecht H-J, Friedberger A (2012) MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1000°C. Microsyst Techn 18:1077-1087
    • (2012) Microsyst Techn , vol.18 , pp. 1077-1087
    • Miyakawa, N.1    Legner, W.2    Ziemann, T.3    Telitschkin, D.4    Fecht, H.-J.5    Friedberger, A.6
  • 17
    • 0034142430 scopus 로고    scopus 로고
    • Diffraction studies of cubic phase stability in undoped zirconia thin films
    • 10.1557/JMR.2000.0058
    • Moulzolf SC, Lad RJ (2000) Diffraction studies of cubic phase stability in undoped zirconia thin films. J Mater Res 15:369-376
    • (2000) J Mater Res , vol.15 , pp. 369-376
    • Moulzolf, S.C.1    Lad, R.J.2
  • 23
    • 21744444606 scopus 로고    scopus 로고
    • Surface chemisty of atomic layer deposition: A case study of the trimethlyaluminium process
    • 10.1063/1.1940727
    • Puurunen RL (2005) Surface chemisty of atomic layer deposition: a case study of the trimethlyaluminium process. J Appl Phys 97:121301
    • (2005) J Appl Phys , vol.97 , pp. 121301
    • Puurunen, R.L.1
  • 24
    • 0032482890 scopus 로고    scopus 로고
    • Transmission electron microscopy study of zirconia-alumina nanoalminates grown by reactive sputter deposition. Part II: Transformation behavior of tetragonal zirconia nanocrystallites
    • 10.1016/S0040-6090(98)00519-7
    • Schofield MA, Aita CR, Rice PM, Gajdardziska-Josifovska M (1998) Transmission electron microscopy study of zirconia-alumina nanoalminates grown by reactive sputter deposition. Part II: transformation behavior of tetragonal zirconia nanocrystallites. Thin Solid Films 326:117-125
    • (1998) Thin Solid Films , vol.326 , pp. 117-125
    • Schofield, M.A.1    Aita, C.R.2    Rice, P.M.3    Gajdardziska-Josifovska, M.4
  • 26
    • 33645674215 scopus 로고    scopus 로고
    • High-temperature MEMS heater platforms: Long-term performance of metal and semiconductor heater material
    • 10.3390/s6040405
    • Spannhake J, Schulz O, Helwig A, Krenkow A, Müller G, Doll T (2006) High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater material. Sensors 6:405-419
    • (2006) Sensors , vol.6 , pp. 405-419
    • Spannhake, J.1    Schulz, O.2    Helwig, A.3    Krenkow, A.4    Müller, G.5    Doll, T.6
  • 28
    • 84864235604 scopus 로고    scopus 로고
    • Solid-state dewetting of thin films
    • 10.1146/annurev-matsci-070511-155048
    • Thompson CV (2012) Solid-state dewetting of thin films. Annu Rev Mater Res 42:399-434
    • (2012) Annu Rev Mater Res , vol.42 , pp. 399-434
    • Thompson, C.V.1
  • 29
  • 30
    • 67549112944 scopus 로고    scopus 로고
    • Challenges in atomic-scale characterization of high-k dielectrics and metal gate electrodes for advanced CMOS gate stacks
    • 10.1179/174328408X307265
    • Zhu X, Zhu J, Li A, Liu Z, Ming N (2009) Challenges in atomic-scale characterization of high-k dielectrics and metal gate electrodes for advanced CMOS gate stacks. J Mater Sci Technol 25:289-313
    • (2009) J Mater Sci Technol , vol.25 , pp. 289-313
    • Zhu, X.1    Zhu, J.2    Li, A.3    Liu, Z.4    Ming, N.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.