-
1
-
-
0013356727
-
Thermodynamics of tetragonal zirconia formation in a nanolaminate film
-
10.1063/1.360902
-
Aita CR, Wiggins MD, Whig R, Scanlan CM (1996) Thermodynamics of tetragonal zirconia formation in a nanolaminate film. J Appl Phys 79:1176-1178
-
(1996)
J Appl Phys
, vol.79
, pp. 1176-1178
-
-
Aita, C.R.1
Wiggins, M.D.2
Whig, R.3
Scanlan, C.M.4
-
2
-
-
79953101798
-
High-temperature battery-free wireless microwave acoustic resonator sensor system
-
10.1049/el.2010.0462
-
Canabal A, Davulis PM, Harris GM, Pereira da Cunha M (2010) High-temperature battery-free wireless microwave acoustic resonator sensor system. Electron Lett 46:471-472
-
(2010)
Electron Lett
, vol.46
, pp. 471-472
-
-
Canabal, A.1
Davulis, P.M.2
Harris, G.M.3
Pereira Da Cunha, M.4
-
3
-
-
38849098322
-
Reliability improvement of suspended platinum-based micro-heating elements
-
10.1016/j.sna.2007.04.006
-
Courbat J, Briand D, de Rooij NF (2008) Reliability improvement of suspended platinum-based micro-heating elements. Sens Actuators A 142:284-291
-
(2008)
Sens Actuators A
, vol.142
, pp. 284-291
-
-
Courbat, J.1
Briand, D.2
De Rooij, N.F.3
-
4
-
-
84857822425
-
Determination and experimental verification of high-temperature SAW orientations on langatate
-
10.1109/TUFFC.2012.2189
-
Davulis PM, Pereira da Cunha M (2012) Determination and experimental verification of high-temperature SAW orientations on langatate. IEEE Trans Ultr Ferr Freq Contr 59:287-411
-
(2012)
IEEE Trans Ultr Ferr Freq Contr
, vol.59
, pp. 287-411
-
-
Davulis, P.M.1
Pereira Da Cunha, M.2
-
5
-
-
0032023866
-
Investigation of high-temperature degradation of platinum thin films with in situ resistance measurement apparatus
-
10.1109/84.661395
-
Firebaugh SL, Jensen KF, Schmidt MA (1998) Investigation of high-temperature degradation of platinum thin films with in situ resistance measurement apparatus. J. Microelectromech Syst 7:128-135
-
(1998)
J. Microelectromech Syst
, vol.7
, pp. 128-135
-
-
Firebaugh, S.L.1
Jensen, K.F.2
Schmidt, M.A.3
-
6
-
-
67649962653
-
Stable electrodes and ultrathin passivation coatings for high temperature sensors in harsh environments
-
Frankel DJ, Bernhardt GP, Sturtevant BT, Moonlight T, Pereira da Cunha M, Lad RJ (2008) Stable electrodes and ultrathin passivation coatings for high temperature sensors in harsh environments. Proc IEEE Sensors 82-85
-
(2008)
Proc IEEE Sensors
, pp. 82-85
-
-
Frankel, D.J.1
Bernhardt, G.P.2
Sturtevant, B.T.3
Moonlight, T.4
Pereira Da Cunha, M.5
Lad, R.J.6
-
7
-
-
21544454515
-
Stabilization of the tetragonal structure in zirconia monocrystals
-
10.1021/j100491a016
-
Garvie RC (1978) Stabilization of the tetragonal structure in zirconia monocrystals. J Phys Chem 82:218-224
-
(1978)
J Phys Chem
, vol.82
, pp. 218-224
-
-
Garvie, R.C.1
-
8
-
-
27744443670
-
Ceramic temperature sensors for harsh environments
-
10.1109/JSEN.2005.844346
-
Gregory OJ, You T (2005) Ceramic temperature sensors for harsh environments. IEEE Sens J 5:833-838
-
(2005)
IEEE Sens J
, vol.5
, pp. 833-838
-
-
Gregory, O.J.1
You, T.2
-
9
-
-
33748614600
-
Advanced high-k dielectric stacks with poly Si and metal gates: Recent progress and current challenges
-
10.1147/rd.504.0387
-
Gusev EP, Narayanan V, Frank MM (2006) Advanced high-k dielectric stacks with poly Si and metal gates: recent progress and current challenges. IBM J Res Dev 50:387-410
-
(2006)
IBM J Res Dev
, vol.50
, pp. 387-410
-
-
Gusev, E.P.1
Narayanan, V.2
Frank, M.M.3
-
11
-
-
33845256627
-
High-performance ultrathin solid oxide fuel cells for low-temperature operation
-
10.1149/1.2372592
-
Huang H, Nakamura M, Su P, Fasching R, Saito Y, Prinz FB (2007) High-performance ultrathin solid oxide fuel cells for low-temperature operation. J Electrochem Soc 154:B20-B24
-
(2007)
J Electrochem Soc
, vol.154
-
-
Huang, H.1
Nakamura, M.2
Su, P.3
Fasching, R.4
Saito, Y.5
Prinz, F.B.6
-
12
-
-
1642578899
-
An overview of high temperature electronics and sensor development at NASA Glenn Research Center
-
10.1115/1.1579508
-
Hunter GW, Neudeck PG, Okojie RS, Beheim GM, Powell JA (2003) An overview of high temperature electronics and sensor development at NASA Glenn Research Center. J. Turbomachinery 125:658-664
-
(2003)
J. Turbomachinery
, vol.125
, pp. 658-664
-
-
Hunter, G.W.1
Neudeck, P.G.2
Okojie, R.S.3
Beheim, G.M.4
Powell, J.A.5
-
13
-
-
78650510555
-
1.92/Pt thin film solid oxide fuel cells: Electrode microstructure and stability considerations
-
10.1016/j.jpowsour.2010.10.068
-
1.92/Pt thin film solid oxide fuel cells: electrode microstructure and stability considerations. J Power Sources 196:2608-2614
-
(2011)
J Power Sources
, vol.196
, pp. 2608-2614
-
-
Kerman, K.1
Lai, B.K.2
Ramanathan, S.3
-
14
-
-
70350625262
-
A high-temperature MEMS heater using suspended silicon structures
-
10.1088/0960-1317/19/11/115011
-
Lee KN, Lee DS, Jung SW, Jang YH, Kim YK, Seong WK (2009) A high-temperature MEMS heater using suspended silicon structures. J Micromech Microeng 19:115011-115018
-
(2009)
J Micromech Microeng
, vol.19
, pp. 115011-115018
-
-
Lee, K.N.1
Lee, D.S.2
Jung, S.W.3
Jang, Y.H.4
Kim, Y.K.5
Seong, W.K.6
-
15
-
-
0035980336
-
Anemometer with hot platinum thin film
-
10.1016/S0924-4247(01)00668-9
-
Mailly F, Giani A, Bonnot R, Temple-Boyer P, Pascal-Delannoy F, Foucaran A, Boyer A (2001) Anemometer with hot platinum thin film. Sens Actuators A 94:32-38
-
(2001)
Sens Actuators A
, vol.94
, pp. 32-38
-
-
Mailly, F.1
Giani, A.2
Bonnot, R.3
Temple-Boyer, P.4
Pascal-Delannoy, F.5
Foucaran, A.6
Boyer, A.7
-
16
-
-
84864614347
-
MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1000°C
-
10.1007/s00542-012-1441-0
-
Miyakawa N, Legner W, Ziemann T, Telitschkin D, Fecht H-J, Friedberger A (2012) MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1000°C. Microsyst Techn 18:1077-1087
-
(2012)
Microsyst Techn
, vol.18
, pp. 1077-1087
-
-
Miyakawa, N.1
Legner, W.2
Ziemann, T.3
Telitschkin, D.4
Fecht, H.-J.5
Friedberger, A.6
-
17
-
-
0034142430
-
Diffraction studies of cubic phase stability in undoped zirconia thin films
-
10.1557/JMR.2000.0058
-
Moulzolf SC, Lad RJ (2000) Diffraction studies of cubic phase stability in undoped zirconia thin films. J Mater Res 15:369-376
-
(2000)
J Mater Res
, vol.15
, pp. 369-376
-
-
Moulzolf, S.C.1
Lad, R.J.2
-
18
-
-
79960496081
-
Thin film electrodes and passivation coatings for harsh environment microwave acoustic sensors
-
10.1117/12.886602
-
Moulzolf SC, Frankel DJ, Bernhardt GP, Nugent B, Lad RJ (2011) Thin film electrodes and passivation coatings for harsh environment microwave acoustic sensors. Proc SPIE: Smart Sens, Actuators, MEMS V 8066:806606
-
(2011)
Proc SPIE: Smart Sens, Actuators, MEMS v
, vol.8066
, pp. 806606
-
-
Moulzolf, S.C.1
Frankel, D.J.2
Bernhardt, G.P.3
Nugent, B.4
Lad, R.J.5
-
20
-
-
48149090180
-
Enabling very high temperature acoustic wave devices for sensor & frequency control applications
-
Pereira da Cunha M, Moonlight T, Lad RJ, Bernhardt G, Frankel DJ (2007) Enabling very high temperature acoustic wave devices for sensor & frequency control applications. Proc. IEEE Ultrasonics 2107-2110
-
(2007)
Proc. IEEE Ultrasonics
, pp. 2107-2110
-
-
Pereira Da Cunha, M.1
Moonlight, T.2
Lad, R.J.3
Bernhardt, G.4
Frankel, D.J.5
-
21
-
-
67649934418
-
High temperature sensing technology for applications up to 1000°C
-
Pereira da Cunha M, Moonlight T, Lad RJ, Frankel DJ, Bernhardt G (2008) High temperature sensing technology for applications up to 1000°C. Proc IEEE Sensors 752-755
-
(2008)
Proc IEEE Sensors
, pp. 752-755
-
-
Pereira Da Cunha, M.1
Moonlight, T.2
Lad, R.J.3
Frankel, D.J.4
Bernhardt, G.5
-
22
-
-
84856882135
-
Recent advances in harsh environment acoustic wave sensors for contemporary applications
-
Pereira da Cunha M, Lad RJ, Moonlight T, Moulzolf SC, Canabal A, Behanan R, Davulis PM, Frankel DJ, Bernhardt G, Pollard T, McCann DF (2011) Recent advances in harsh environment acoustic wave sensors for contemporary applications. Proc IEEE Sensors 614-617
-
(2011)
Proc IEEE Sensors
, pp. 614-617
-
-
Pereira Da Cunha, M.1
Lad, R.J.2
Moonlight, T.3
Moulzolf, S.C.4
Canabal, A.5
Behanan, R.6
Davulis, P.M.7
Frankel, D.J.8
Bernhardt, G.9
Pollard, T.10
McCann, D.F.11
-
23
-
-
21744444606
-
Surface chemisty of atomic layer deposition: A case study of the trimethlyaluminium process
-
10.1063/1.1940727
-
Puurunen RL (2005) Surface chemisty of atomic layer deposition: a case study of the trimethlyaluminium process. J Appl Phys 97:121301
-
(2005)
J Appl Phys
, vol.97
, pp. 121301
-
-
Puurunen, R.L.1
-
24
-
-
0032482890
-
Transmission electron microscopy study of zirconia-alumina nanoalminates grown by reactive sputter deposition. Part II: Transformation behavior of tetragonal zirconia nanocrystallites
-
10.1016/S0040-6090(98)00519-7
-
Schofield MA, Aita CR, Rice PM, Gajdardziska-Josifovska M (1998) Transmission electron microscopy study of zirconia-alumina nanoalminates grown by reactive sputter deposition. Part II: transformation behavior of tetragonal zirconia nanocrystallites. Thin Solid Films 326:117-125
-
(1998)
Thin Solid Films
, vol.326
, pp. 117-125
-
-
Schofield, M.A.1
Aita, C.R.2
Rice, P.M.3
Gajdardziska-Josifovska, M.4
-
25
-
-
0035876004
-
Microhotplate platforms for chemical sensor research
-
10.1016/S0925-4005(01)00695-5
-
Semancik S, Cavicchi RE, Wheeler MC, Tiffany JE, Poirier GE, Walton RM, Suehle JS, Panchapakesan B, DeVoe DL (2001) Microhotplate platforms for chemical sensor research. Sens Actuators B 77:579-591
-
(2001)
Sens Actuators B
, vol.77
, pp. 579-591
-
-
Semancik, S.1
Cavicchi, R.E.2
Wheeler, M.C.3
Tiffany, J.E.4
Poirier, G.E.5
Walton, R.M.6
Suehle, J.S.7
Panchapakesan, B.8
Devoe, D.L.9
-
26
-
-
33645674215
-
High-temperature MEMS heater platforms: Long-term performance of metal and semiconductor heater material
-
10.3390/s6040405
-
Spannhake J, Schulz O, Helwig A, Krenkow A, Müller G, Doll T (2006) High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater material. Sensors 6:405-419
-
(2006)
Sensors
, vol.6
, pp. 405-419
-
-
Spannhake, J.1
Schulz, O.2
Helwig, A.3
Krenkow, A.4
Müller, G.5
Doll, T.6
-
28
-
-
84864235604
-
Solid-state dewetting of thin films
-
10.1146/annurev-matsci-070511-155048
-
Thompson CV (2012) Solid-state dewetting of thin films. Annu Rev Mater Res 42:399-434
-
(2012)
Annu Rev Mater Res
, vol.42
, pp. 399-434
-
-
Thompson, C.V.1
-
30
-
-
67549112944
-
Challenges in atomic-scale characterization of high-k dielectrics and metal gate electrodes for advanced CMOS gate stacks
-
10.1179/174328408X307265
-
Zhu X, Zhu J, Li A, Liu Z, Ming N (2009) Challenges in atomic-scale characterization of high-k dielectrics and metal gate electrodes for advanced CMOS gate stacks. J Mater Sci Technol 25:289-313
-
(2009)
J Mater Sci Technol
, vol.25
, pp. 289-313
-
-
Zhu, X.1
Zhu, J.2
Li, A.3
Liu, Z.4
Ming, N.5
|