Initial phases in sputter deposited HfO 2 - Al 2O 3 nanolaminate films

Applied Physics Letters

Volumn 91, Issue 20, 2007, Pages

  Hoppe, E E ^a,b   Aita, C R ^a,b   Gajdardziska Josifovska, M ^a  

^a UNIVERSITY OF WISCONSIN MILWAUKEE   (United States)

^b University of Wisconsin Milwaukee   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE CRYSTAL SIZE; LAYER THICKNESS; NANOLAMINATE FILMS; POLYSYNTHETIC TWINNING;

FUSED SILICA; HAFNIUM COMPOUNDS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TWINNING; X RAY DIFFRACTION ANALYSIS;

LAMINATES;

EID: 36248937658     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2813624     Document Type: Article

References (15)

1. V. A. Lysenko, Inorg. Chem. 30, 1003 (1994).
2. J. Kang, E.-C. Lee, and K. J. Chang, Phys. Rev. B 68, 054106 (2003).
3. J. E. Jaffe, R. A. Bachorz, and M. Gutowski, Phys. Rev. B 72, 144107 (2005).
4. O. Ohtaka, T. Yamanaka, S. Kume, N. Hara, H. Asano, and F. Izumi, J. Am. Ceram. Soc. 78, 33 (1995).
5. J. E. Lowther, J. K. Dewhurst, J. M. Leger, and J. Haines, Phys. Rev. B 60, 14485 (1999).
6. F. Huber, IEEE Trans. Parts, Hybrids, Packaging, PHP-7, 141 (1971).
7. E. E. Hoppe, R. S. Sorbello, and C. R. Aita, J. Appl. Phys. 101, 123534 (2007).
8. Y. Yang, W. Zhu, T. P. Ma, and S. Stemmer, J. Appl. Phys. 95, 3772 (2004).
9. C. R. Aita, E. E. Hoppe, and R. S. Sorbello, Appl. Phys. Lett. 82, 677 (2003).
10. Joint Committee on Powder Diffraction Standards Card No. 78-0050.
11. Joint Committee on Powder Diffraction Standards Card No. 8-0342.
12. J. Aarik, J. Sundqvist, A. Aidla, J. Lu, T. Sajavaara, K. Kukli, and A. Hrsta, Thin Solid Films 418, 69 (2002).
13. P. Keblinski, A. Maritan, F. Toigo, R. Messier, and J. R. Banavar, Phys. Rev. E 53, 759 (1996).
14. F. Bohra, B. Jiang, and J.-M. Zuo, Appl. Phys. Lett. 90, 161917 (2007).
15. V. Y. Gertsman, A. P. Zhilyaev, and J. A. Szpunar, Modell. Simul. Mater. Sci. Eng. 5, 35 (1997).