Stable electrodes and ultrathin passivation coatings for high temperature sensors in harsh environments

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 82-85

  Frankel, D J ^a   Bernhardt, G P ^a   Sturtevant, B T ^a,b   Moonlight, T ^a   Pereira Da Cunha, M ^a,c   Lad, R J ^a,b  

^a UNIVERSITY OF MAINE   (United States)

^b Deptof Physics and Astronomy   (United States)

^c Dept of Electrical and Computer Engineering ^*

Author keywords

[No Author keywords available]

Indexed keywords

E-BEAM CO-EVAPORATION; ELECTRODE STRUCTURE; HARSH ENVIRONMENT; HIGH TEMPERATURE SENSORS; NANO-STRUCTURED; PASSIVATION COATING; RECRYSTALLIZATION; RF-MAGNETRON SPUTTERING; SENSOR OPERATIONS; SENSOR SURFACES; ULTRA-THIN;

AMORPHOUS FILMS; ELECTRODES; MAGNETRON SPUTTERING; PASSIVATION; PLATINUM; RHODIUM; TEMPERATURE SENSORS; X RAY DIFFRACTION; ZIRCONIUM ALLOYS;

PROTECTIVE COATINGS;

EID: 67649962653     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716388     Document Type: Conference Paper

References (11)

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