High temperature sensing technology for applications up To 1000°C

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 752-755

  Da Cunha, Mauricio Pereira ^a,b   Moonlight, Thomas ^a   Lad, Robert ^b   Frankel, David ^a,c   Bernhardt, George ^a,c  

^a UNIVERSITY OF MAINE   (United States)

^b University of Maine   (United States)

^c University of Maine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE SENSORS; CODEPOSITION; DE-WETTING; DEVICE FAILURES; ELECTRICAL CONTINUITY; HARSH ENVIRONMENT; HIGH TEMPERATURE; HIGH-TEMPERATURE SENSING; INTER-DIGITATED ELECTRODES; LANGASITE; OVERLAYERS; PT FILMS; RESEARCH AND DEVELOPMENT; SENSOR SURFACES; SPACE EXPLORATIONS; STABLE OPERATION; THIN ELECTRODE; THIN FILM SURFACES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ELECTRODES; HIGH TEMPERATURE APPLICATIONS; JET ENGINES; PLATINUM; PLATINUM ALLOYS; RHODIUM; SENSORS; SPACE RESEARCH; THIN FILM DEVICES; THIN FILMS; ZIRCONIA;

ATMOSPHERIC TEMPERATURE;

EID: 67649934418     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716550     Document Type: Conference Paper

References (7)

1. J.A. Thiele and M. Pereira da Cunha, "High temperature LGS SAW gas sensor," Sens. and Actuators B: Chem., vol.113, issue 2, pp. 246-252.
2. J. A. Thiele and M. Pereira da Cunha, "Platinum and palladium high temperature transducers on langasite," IEEE Trans. Ultrason. Ferroelec. Freq. Contr., Vol.52, No. 04, April 2005, pp. 545-549.
3. US Patent No. 7,285,894 for "Surface Acoustic Wave Devices for High Temperature Applications", issued October 23, 2007.
4. G. Bernhardt, C. Silvestre, N. LeCursi, S.C. Moulzolf, D.J. Frankel, R.J. Lad, "Performance of Zr and Ti adhesion layers for bonding of platinum metallization to sapphire substrates," Sensors and Actuators B: Chemical, v77, pp. 368-374, 2001. (Pubitemid 32544373)
5. M. Pereira da Cunha, T. Moonlight+, R. Lad, G. Bernhardt, D. J. Frankel, "Enabling Very High Temperature Acoustic Wave Devices for Sensor & Frequency Control Applications" IEEE 2007 International Ultrasonics Symposium Proceedings, New York, NY, USA, Oct. 28-31, 2007, pp. 2107-2110.
6. US Patent Application Serial No. 11/891,081 for "Ultra-Thin Film Electrodes and Protective Layer for High Temperature Device Applications", filed August 9, 2007.
7. D.J. Frankel, G. Bernhardt, B. Sturtevant, T. Moonlight, M. Pereira da Cunha, R.J. Lad, "Stable Electrodes and Ultrathin Passivation Coatings for High Temperature Sensors in Harsh Environments," The 7th IEEE Conference on Sensors Proceedings, Lecce, Italy, October 2008 (in press).