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Volumn 534, Issue , 2013, Pages 198-204

Properties of SiAlO2N protective coatings on surface acoustic wave devices

Author keywords

Elastic moduli; Protective coatings; Silicon aluminum oxynitride; Surface acoustic wave devices

Indexed keywords

AMORPHOUS STRUCTURES; DIELECTRIC PERMITTIVITIES; MULTILAYER STRUCTURES; NUMERICAL IMPLEMENTATION; RF-MAGNETRON SPUTTERING; SILICON ALUMINUM OXYNITRIDE; TEMPERATURE-COEFFICIENT OF DELAYS; TEMPERATURE-FREQUENCY CHARACTERISTICS;

EID: 84876693502     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.02.062     Document Type: Article
Times cited : (4)

References (29)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.