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Volumn 534, Issue , 2013, Pages 198-204
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Properties of SiAlO2N protective coatings on surface acoustic wave devices
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Author keywords
Elastic moduli; Protective coatings; Silicon aluminum oxynitride; Surface acoustic wave devices
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Indexed keywords
AMORPHOUS STRUCTURES;
DIELECTRIC PERMITTIVITIES;
MULTILAYER STRUCTURES;
NUMERICAL IMPLEMENTATION;
RF-MAGNETRON SPUTTERING;
SILICON ALUMINUM OXYNITRIDE;
TEMPERATURE-COEFFICIENT OF DELAYS;
TEMPERATURE-FREQUENCY CHARACTERISTICS;
ALUMINUM ALLOYS;
ALUMINUM NITRIDE;
ELASTIC MODULI;
FILM PREPARATION;
MAGNETRON SPUTTERING;
NUMERICAL METHODS;
PERMITTIVITY;
PROTECTIVE COATINGS;
QUARTZ;
SAPPHIRE;
SILICON OXIDES;
VISCOSITY MEASUREMENT;
ACOUSTIC SURFACE WAVE DEVICES;
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EID: 84876693502
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2013.02.062 Document Type: Article |
Times cited : (4)
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References (29)
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