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Volumn 18, Issue 7-8, 2012, Pages 1077-1087

MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

Author keywords

[No Author keywords available]

Indexed keywords

COMBUSTION HEAT; CONVERGING/DIVERGING NOZZLES; DEEP REACTIVE ION ETCHING; ELECTRICAL CHARACTERIZATION; FULLY INTEGRATED; LATERAL SCALE; MAXIMUM TEMPERATURE; MICROTHRUSTER; MORPHOLOGY CHANGES; PLATINUM THIN FILM; PT THIN FILMS; RESISTANCE TEMPERATURE DETECTORS; ROOM TEMPERATURE; SENSOR SIGNALS; TEMPERATURE CYCLES;

EID: 84864614347     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-012-1441-0     Document Type: Conference Paper
Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.