-
2
-
-
0030105837
-
CVD of SiO2 and related materials: An overview
-
Barron AR (1996) CVD of SiO2 and related materials: an overview. Adv Mater Opt Electron 6:101-114
-
(1996)
Adv Mater Opt Electron
, vol.6
, pp. 101-114
-
-
Barron, A.R.1
-
3
-
-
84864605554
-
-
CANEUS
-
Chiarini M, Cerabolini P, Pennestri G, Bentini GG, Cocomazzi R, Cerutti A, Nubile A (2006) Monolithic silicon-based microthruster for orbital and attitude control fabricated by using MEMS technologies. In: CANEUS
-
(2006)
Monolithic Silicon-based Microthruster for Orbital and Attitude Control Fabricated by Using MEMS Technologies
-
-
Chiarini, M.1
Cerabolini, P.2
Pennestri, G.3
Bentini, G.G.4
Cocomazzi, R.5
Cerutti, A.6
Nubile, A.7
-
4
-
-
0032023866
-
Investigation of hightemperature degradation of platinum thin films with an in situ resistance measurement apparatus
-
Firebaugh SL, Jensen KF, Schmidt MA (1998) Investigation of hightemperature degradation of platinum thin films with an in situ resistance measurement apparatus. J Microelectromech Syst 7(1):128-135
-
(1998)
J Microelectromech Syst
, vol.7
, Issue.1
, pp. 128-135
-
-
Firebaugh, S.L.1
Jensen, K.F.2
Schmidt, M.A.3
-
5
-
-
31044446088
-
Comparison of the agglomeration behavior of thin metallic films on SiO2
-
Gadkari PR, Warren AP, Todi RM, Petrova RV, Coffey KR (2005) Comparison of the agglomeration behavior of thin metallic films on SiO2. J Vac Sci Technol A 23(4):1152-1161
-
(2005)
J Vac Sci Technol A
, vol.23
, Issue.4
, pp. 1152-1161
-
-
Gadkari, P.R.1
Warren, A.P.2
Todi, R.M.3
Petrova, R.V.4
Coffey, K.R.5
-
7
-
-
0035669901
-
MEMS-based satellite micropropulsion via catalyzed hydrogen peroxide decomposition
-
Hitt DL, Zakrzwski CM, Thomas MA (2001) MEMS-based satellite micropropulsion via catalyzed hydrogen peroxide decomposition. Smart Mater Struct 10:1163-1175
-
(2001)
Smart Mater Struct
, vol.10
, pp. 1163-1175
-
-
Hitt, D.L.1
Zakrzwski, C.M.2
Thomas, M.A.3
-
9
-
-
33645157499
-
Direct bonding with on-wafer metal interconnections
-
Jia C, Wiemer M, Gessner T (2006) Direct bonding with on-wafer metal interconnections. Microsyst Technol 12:391-396
-
(2006)
Microsyst Technol
, vol.12
, pp. 391-396
-
-
Jia, C.1
Wiemer, M.2
Gessner, T.3
-
13
-
-
0034317769
-
High temperature materials for thin-film thermocouples on silicon wafers
-
Kreider KG, Gillen G (2000) High temperature materials for thin-film thermocouples on silicon wafers. Thin Solid Films 376:32-37
-
(2000)
Thin Solid Films
, vol.376
, pp. 32-37
-
-
Kreider, K.G.1
Gillen, G.2
-
15
-
-
36849046281
-
Development and ground tests of a 100-millinewton hydrogen peroxide monopropellant microthruster
-
Kuan C-K, Chen G-B, Chao Y-C (2007) Development and ground tests of a 100-millinewton hydrogen peroxide monopropellant microthruster. J Propuls Pow 23(6):1313-1320
-
(2007)
J Propuls Pow
, vol.23
, Issue.6
, pp. 1313-1320
-
-
Kuan, C.-K.1
Chen, G.-B.2
Chao, Y.-C.3
-
16
-
-
35348847793
-
Annealing characteristics and strain resistance of 99.93 wt% platinum. Implications for the manufacture of platinum artefacts
-
Loginov YN, Yermakov AV, Grohovskaya LG, Studenok GI (2007) Annealing characteristics and strain resistance of 99.93 wt% platinum. Implications for the manufacture of platinum artefacts. Platinum Metals Rev 51(4):178-184
-
(2007)
Platinum Metals Rev
, vol.51
, Issue.4
, pp. 178-184
-
-
Loginov, Y.N.1
Yermakov, A.V.2
Grohovskaya, L.G.3
Studenok, G.I.4
-
17
-
-
0032108361
-
Thin-film characterization for high-temperature applications
-
Lourenco MJ, Serra JM, Nunes MR, Vallera AM, Nieto de Castro CA (1998) Thin-film characterization for high-temperature applications. Int J Thermophys 19(4):1253-1265
-
(1998)
Int J Thermophys
, vol.19
, Issue.4
, pp. 1253-1265
-
-
Lourenco, M.J.1
Serra, J.M.2
Nunes, M.R.3
Vallera, A.M.4
Nieto De Castro, C.A.5
-
18
-
-
22844433828
-
Silicon MEMS vaporizing liquid microthruster with internal microheater
-
Maurya DK, Das S, Lahiri SK (2005) Silicon MEMS vaporizing liquid microthruster with internal microheater. J Micromech Microeng 15:966-970
-
(2005)
J Micromech Microeng
, vol.15
, pp. 966-970
-
-
Maurya, D.K.1
Das, S.2
Lahiri, S.K.3
-
19
-
-
0001867494
-
Thruster options for microspacecraft: A review and evaluation of state-of-The-art and emerging technologies
-
Micci MM, Ketsdever AD (eds)
-
Mueller J (2000) Thruster options for microspacecraft: a review and evaluation of state-of-the-art and emerging technologies. In: Micci MM, Ketsdever AD (eds) Micropropulsion for small spacecraft (Progress in astronautics and aeronautics, 187), pp 45-137
-
(2000)
Micropropulsion for Small Spacecraft (Progress in Astronautics and Aeronautics
, Issue.187
, pp. 45-137
-
-
Mueller, J.1
-
21
-
-
0025383681
-
An etch rate study on thermally annealed SiO2 films deposited in a TEOS-LPCVD system
-
Orfescu C, Pavelescu C, Badila M (1990) An etch rate study on thermally annealed SiO2 films deposited in a TEOS-LPCVD system. J Mater Sci 25:1366-1368
-
(1990)
J Mater Sci
, vol.25
, pp. 1366-1368
-
-
Orfescu, C.1
Pavelescu, C.2
Badila, M.3
-
22
-
-
34249275311
-
-
42nd AIAA/ ASME/SAE/ASEE joint propulsion conference and exhibit
-
Scharlemann C, Schiebl M, Marhold K, Tajmar M, Miotti P, Kappenstin C et al. (2006) Development and test of a miniature hydrogen peroxide monopropellant thruster. In: 42nd AIAA/ ASME/SAE/ASEE joint propulsion conference and exhibit
-
(2006)
Development and Test of A Miniature Hydrogen Peroxide Monopropellant Thruster
-
-
Scharlemann, C.1
Schiebl, M.2
Marhold, K.3
Tajmar, M.4
Miotti, P.5
Kappenstin, C.6
-
23
-
-
0030110261
-
Oxygen diffusion through thin Pt films on Si(100)
-
Schmiedl R, Demuth V, Lahnor P, Godehardt H, Bodschwinna Y, Harder C et al (1996) Oxygen diffusion through thin Pt films on Si(100). Appl Phys A 62:223-230
-
(1996)
Appl Phys A
, vol.62
, pp. 223-230
-
-
Schmiedl, R.1
Demuth, V.2
Lahnor, P.3
Godehardt, H.4
Bodschwinna, Y.5
Harder, C.6
-
24
-
-
27744474006
-
Combustion systems for power-MEMS applications
-
Massachusetts Institute of Technology
-
Spadaccini CM (2004) Combustion systems for power-MEMS applications. Dissertation. Massachusetts Institute of Technology
-
(2004)
Dissertation
-
-
Spadaccini, C.M.1
-
25
-
-
4244191365
-
Microfabricated reactors for partial oxidation reactions
-
Massachusetts Institute of Technology
-
Srinivasan R (1998) Microfabricated reactors for partial oxidation reactions. Dissertation. Massachusetts Institute of Technology. Available online at http://dspace.mit.edu/handle/1721.1/9865
-
(1998)
Dissertation
-
-
Srinivasan, R.1
-
26
-
-
33645511623
-
Wafer scale packaging of MEMS by using plasmaactivated wafer bonding
-
Suni T, Henttinen K, Lipsanen A, Dekker J, Luoto H, Kulawski M (2006) Wafer scale packaging of MEMS by using plasmaactivated wafer bonding. J Electrochem Soc 153(1):G78-G82
-
(2006)
J Electrochem Soc
, vol.153
, Issue.1
-
-
Suni, T.1
Henttinen, K.2
Lipsanen, A.3
Dekker, J.4
Luoto, H.5
Kulawski, M.6
-
27
-
-
13744254350
-
Performance comparison of Ir/CNF and Ir/Al2O3 catalysts in a 2 N hydrazine microthruster
-
Vieira R, Bernhardt P, Ledoux M-J, Pham-Huu C (2005) Performance comparison of Ir/CNF and Ir/Al2O3 catalysts in a 2 N hydrazine microthruster. Catal Lett 99(3-4):177-180
-
(2005)
Catal Lett
, vol.99
, Issue.3-4
, pp. 177-180
-
-
Vieira, R.1
Bernhardt, P.2
Ledoux, M.-J.3
Pham-Huu, C.4
-
28
-
-
84864601141
-
Thermal/stress finite element analysis applied to the design and packaging of a vaporizing liquid microthruster
-
Wallace A (1997) Thermal/stress finite element analysis applied to the design and packaging of a vaporizing liquid microthruster. In: JPL TRS 1992?, dc.identifier, pp1-9. http://hdl.handle.net/2014/21708
-
(1997)
JPL TRS 1992?, Dc.identifier
, pp. 1-9
-
-
Wallace, A.1
-
29
-
-
33747600386
-
MEMS-based combustor with hairpin-shape design of gas recirculation channel
-
Wang ZF, Wu M, Shan XC, Hua JS (2006) MEMS-based combustor with hairpin-shape design of gas recirculation channel. Microsyst Technol 12:993-997
-
(2006)
Microsyst Technol
, vol.12
, pp. 993-997
-
-
Wang, Z.F.1
Wu, M.2
Shan, X.C.3
Hua, J.S.4
-
30
-
-
33745108757
-
The electrothermal feasibility of carbon microcoil heaters for cold/hot gas microthrusters
-
Williams KL, Eriksson AB, Thorslund R, Köhler J, Boman M, Stenmark L (2006) The electrothermal feasibility of carbon microcoil heaters for cold/hot gas microthrusters. J Micromech Microeng 16:1154-1161
-
(2006)
J Micromech Microeng
, vol.16
, pp. 1154-1161
-
-
Williams, K.L.1
Eriksson, A.B.2
Thorslund, R.3
Köhler, J.4
Boman, M.5
Stenmark, L.6
-
32
-
-
58149326766
-
The design, fabrication and characterization of a silicon microheater for an integrated MEMS gas preconcentrator
-
Yeom J, Field CR, Bae B, Masel RI, Shannon MA (2008) The design, fabrication and characterization of a silicon microheater for an integrated MEMS gas preconcentrator. J Micromech Microeng 18:125001
-
(2008)
J Micromech Microeng
, vol.18
, pp. 125001
-
-
Yeom, J.1
Field, C.R.2
Bae, B.3
Masel, R.I.4
Shannon, M.A.5
-
33
-
-
22844435998
-
A MEMS-based solid propellant microthruster with Au/Ti igniter
-
Zhang KL, Chou SK, Ang SS, Tang XS (2005) A MEMS-based solid propellant microthruster with Au/Ti igniter. Sens Actuators A 122:113-123
-
(2005)
Sens Actuators A
, vol.122
, pp. 113-123
-
-
Zhang, K.L.1
Chou, S.K.2
Ang, S.S.3
Tang, X.S.4
|