Nanomechanical cantilever devices for biological sensors

Micromanufacturing and Nanotechnology

Volumn , Issue , 2006, Pages 299-321

  Kim, Tae Song ^a   Lee, Jeong Hoon ^a   Yoon, Dae Sung ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84891995347     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/3-540-29339-6_13     Document Type: Chapter

References (58)

1. Arntz Y, Seelig JD, Lang HP, Zhang J, Hunziker P, Ramseyer JP, Meyer E, Hegner M, Gerber C (2003) Label-free protein assay based on a nanomechanical cantilever array, Nanotechnology 14:86
2. Abedinov N, Grabiec P, Gotszalk T, Ivanov T, Voigt J, and Rangelow IW (2001) Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection, J. Vac. Sci. Technol. A 19:2884
3. Alexander S, Hellemas L, Marti O, Schneir S, Elings V, Hansma PK, Longmire M, Gurley J (1989) An atomic-resolution atomic-force microscope implemented using an optical lever. J. Appl. Phys. 65:164
4. Alvarez M, Calle A, Tamayo J, Lechuga L, Montoya A (2003) Development of nanomechanical biosensors for detection of the pesticide DDT. Biosens. Bioelectron. 18:649
5. Amantea R, Goodman LA, Pantuso F, Sauer DJ, Varhese M, Villianni TS, White LK (1998) Progress toward an uncooled IR imager with 5-mK NETD, Infrared Technology and Applications, vol. XXIV 3436, pp 647
6. Amantea R, Knoedler CM, Pantuso FP, Patel VK, Sauer DJ, Tower JR (1997). In: Orlando, FL (ed) Proc. of the SPIE, vol. 3061, pp 210-215
7. Antonik,MD, D'Costa NP, Hoh JH (1997) A biosensor based on micromechanical interrogation of living cells, IEEE Eng. Med. Biol. 16:66
8. Arntz Y, Seelig JD, Lang HP, Zhang J, Hunziker P, Ramseyer JP, Meyer E, Hegner M and Gerber CH (2003) Label-free protein assay based on a nanomechanical cantilever array, Nanotechnology 14:86-89
9. Baselt DR, Gil U Lee, Richard J. Colton, J (1996) Biosensor based on force microscope technology, J. Vac. Sci. Technol. B 14 :789-793
10. Baxter LK (1997) Capacitive Sensors, Design and Applications, IEEE Press, New York
11. Berger R, Delamarche E, Lang HP, Gerber C, Gimzewski JK, Meyer E, Guntherodt HJ (1997) Surface stress in the self-assembly of alkanethiols on gold, Science 276:2021
12. Berger R, Gerber CH and Gimzewski JK (1996) Analytical methods & instrumentation. Special Issue μ TAS'96, pp 74-77
13. Blanc N, Brugger J, Rooij NF de, Duerig U, (1996) Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors, J. Vac. Sci. Technol. B14:901
14. Bonaccurso E, Butt H-J, Franz V, Stepputat M, Raiteri R (2000) A new microcantileverbased surface stress sensor for operation in liquids. Cantilever sensors and nanostructures, Heidelberg
15. Brath FG, Humphery JAC (2002) Sensors and sensing in biology and engineering. Springer, New York, pp 337-345
16. Britton CL, Jones RL, Oden PI, Hu Z, Warmack RJ, Smith SF, Bryan WL, Rochelle JM (2000) Multiple-input microcantilever sensors, Ultramicroscopy 82:17-20
17. Butt HJ, Siedle P, Seifert K, Fendler K, Seeger T, Bamberg E, Weisenhorn AL, Goldie K, Engel A (1993) Scan speed limit in atomic force microscopy, J. Microsc. 169:75-80
18. Butt HJ, (1996) A Sensitive method to measure changes in the surface stress of solids, J. Colloid Interf. Sci. 180:251
19. Chen GY, Thundat T, Wachter EA, Warmack RJ (1995) Adsorption-induced surface stress and its effects on resonance frequency of microcantilever, J. Appl. Phys. 66:1695
20. Cherian S, Thundat T (2002) Determination of adsorption-induced variation in the spring constant of a microcantilever, Appl. Phys. Lett. 80:2219
21. Datskos PG, Sepaniak MJ, Tripple CA, Lavrik N (2001) Photomechanical chemical microsensors, Sensors and Actuators B 76:393
22. Davis ZJ, Abadal G, Kuhn o, Hansen O, Grey F, Boisen A (2000) Fabrication and characterisation of nanoresonating devices for mass detection, J. Vac. Sci. Technol. B 18:162
23. Erbe A, Weiss C, Zwerger W, Blick RH (2001) Nanomechanical resonator shuttling single electrons at radio frequencies, Phys Rev. Lett. 87:96106
24. Fritz J, Baller MK, Lang HP, Rothuizen H, Vettiger P, Meyer E, Guntherodt HJ, Gerber C, Gimzewski JK (2000) Translating biomolecular recognition into nanomechanics, Science 288:316
25. Fujii T, Watanabe S (1996) Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern, Appl. Phys. Lett. 68:467
26. Gupta A, Akin D, Bashir R (2004) Single virus particle mass detection using microresonators with nanoscale thickness, Appl. Phys. Lett. 84:1976
27. Hansen KM, Ji HF, Wu G, Datar R, Cote R, Majumdar A, Thundat T (2001) Cantileverbased optical deflection assay for discrimination of DNA single-nucleotide mismatches, Anal. Chem. 73:1567
28. Ilic B, Czaplewski C, Craighead HG, Neuzil P, Campagnolo C, Batt C (2000) Mechanical resonant immunospecific biological detector, Appl. Phys. Lett. 77:450
29. Ilic B, Czaplewski D, Zalalutdinov M, Craighead HG, Neuzil P, Campagnolo C, Batt C (2001) Single cell detection with micromechanical oscillators, J. Vac. Sci. Technol. B 19:2825
30. Kaw AK (1997) Mechanics of composite materials. CRC Press
31. Kim HJ, Kim YB, Park J, Kim TS (2003) Biological element detection sensor application of micromachined PZT thick film cantilever. IEEE Sensors, Toronto, Canada
32. Lavrik NV, Sepaniak MJ, Datskos PG (2004) Cantilever transducers as a platform for chemical and biological sensors, Rev. Sci. Instrum. 75:2229
33. Lee C, Itoh T, Suga T (1999) Self-excited piezoelectric PZT microcantilevers for dynamic SFM with inherent sensing and actuating capabilities, Sensors and Actuators A72:179
34. Lee JH, Yoon KH, Hwang KS, Park J, Ahn S, Kim TS (2004) Label free novel electrical detection using micromachined PZT monolithic thin film cantilever for the detection of C-reactive protein. Biosens, Bioelectron. 20:269
35. Lee JH, Kim TS, Yoon KH, (2004) Effect of mass and stress on resonant frequency shift of functionalised Pb(Zr0.52Ti0.48)O3 thin film microcantilever for the detection of Creactive protein, Appl. Phys. Lett. 84:3187
36. Lee JH, Yoon KH, Kim TS (2002) Characterisation of resonant behavior and sensitivity micromachined PZT cantilever, Integr. Ferroelectr. 50:43
37. Lee JH, Hwang KS, Park J, Yoon KH, Yoon DS, Kim TS (2005) Immunoassay of prostate0specific antigen (PSA) using resonant frequency shift of piezoelectric nanomechanical cantilever, Biosens. Bioelectron. 20:2157
38. Martin Y, Williams CC, Wickramasinghe HK (1987) Atomic force microscope-force mapping and profiling on a sub 100-A scale, J. Appl. Phys. 61:4723
39. Mehta A (2001) Manipulation and controlled amplification of Brow-nian motion of microcantilever sensors, Appl. Phys. Lett. 78:1637
40. Mertens J, Finota E, Thundat T, Fabre A, Bourillot E (2003) Effects of temperature and pressure on microcantilever resonance response, Ultramicroscopy 97:119
41. Meyer G and Amer NM (1988) Novel optical approach to atomic force microscopy, Appl. Phys. Lett. 53:1045
42. Minne SC, Manalis SR, Quate CF (1995) Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric Actuators, Appl. Phys. Lett. 67:3918
43. Moulin AM, O'Shea SJ, Badley RA, Doyle P, Welland ME (1999) Measuring surfaceinduced conformational changes in protein, Langmuir 15:8776
44. Raiteri R et al.(1999) Sensing of biological substances based on the bending of microfabricated cantilevers, Sensor Actuat. B-Chem 61:213
45. Raiteri R, Grattarola M, Butt HJ, Skladal P (2001) Micromechanical cantilever-based biosensors, Sens. Actuators B 79:115
46. Rodolphe M (2002), DNA Hybridisation investigated by microcantilever- based sensor. M. Sc. thesis, MIC Technical University of Denmark
47. Rugar D, Mamin HJ, and Guethner P (1989) Improved fiber-optic interferometer for atomic force microscopy, Appl. Phys. Lett. 55:2588
48. Rugar D, Mamin HJ, and Terris BD (1998) Force microscope using a fiber-optic displacement sensor, Rev. Sci. Instrum. 59:2337
49. Rugar D, Yannoni CS, and Sidles JA (1992) Mechanical detection of magnetic resonance, Nature 360:563
50. Smits JG, Choi W-S (1991) The Constituent equations of piezoelectric heterogeneous bimorphs, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38:256
51. Tamayo J (2001) Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor, Ultramicroscopy 86:167
52. Thaysen J, Boisen A, Hansen O, and Bouwstra S (2000) Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical wheatstone bridge arrangement, Sens. Actuators, A 83:47
53. Thundat T, Wachter EA, Sharp SL, Warmack RJ (1995) Detection of Mercury Vapor Using Resonating Cantilevers, Appl. Phys. Lett. 66:1695
54. Tortonese M, Barrett RC, and Quate CF (1993) Piezoresistive silicon cantilever Method, Appl. Phys. Lett. 62:834
55. Wee KW, Kang GY, Park J, Kang JY, Yoon DS, Park JH, Kim TS (2005) Novel electrical detection of label-free disease marker proteins using piezoresistive self-sensing microcantilever, Biosens. Bioelectr. 20:1932
56. Wu GH, Data RH, Hansen KM, Thundat T, Cote RJ, Majumdar A (2001) Bioassay of prostate-specific antigen (PSA) using microcantilevers, Nat. Biotechnol. 19:856
57. Yi JW, Shih WY, Shih W-H (2002) Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers, J. Appl. Phys 91:1680
58. Yu X, Thaysen J, Hansen O, Boisen A (2002) Optimisation of sensitivity and noise in piezoresistive cantilevers, J. Appl. Phys. 92:6296