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Volumn 68, Issue 4, 1996, Pages 467-468
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Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern
a a |
Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0003051886
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.116415 Document Type: Article |
Times cited : (46)
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References (11)
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