Biological Element Detection Sensor Application Of Micromachined PZT Thick Film Cantilever

Proceedings of IEEE Sensors

Volumn 2, Issue 2, 2003, Pages 1054-1058

  Kim, Hyung Joon ^a   Kim, Yong Bum ^a   Park, Jaebum ^a   Kim, Tae Song ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Biosensor; Cantilever; Thick film

Indexed keywords

ANTIBODIES; ANTIGENS; ELECTRODES; FLUORESCENCE; MICROMACHINING; PLATINUM; SCREEN PRINTING; SENSITIVITY ANALYSIS; THICK FILMS; TITANIUM DIOXIDE;

CANTILEVERS; MASS DETECTION;

BIOSENSORS;

EID: 1542363356     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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