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Volumn 5, Issue , 2014, Pages

Room-temperature sub-band gap optoelectronic response of hyperdoped silicon

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; SILICON;

EID: 84891776337     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms4011     Document Type: Article
Times cited : (217)

References (59)
  • 1
    • 84878585493 scopus 로고    scopus 로고
    • Broadband high photoresponse from pure monolayer graphene photodetector
    • Zhang, Y. et al. Broadband high photoresponse from pure monolayer graphene photodetector. Nat. Commun. 4, 1811 (2013).
    • (2013) Nat. Commun. , vol.4
    • Zhang, Y.1
  • 2
    • 79955070917 scopus 로고    scopus 로고
    • A monolithically integrated plasmonic infrared quantum dot camera
    • Lee, S. J. et al. A monolithically integrated plasmonic infrared quantum dot camera. Nat. Commun. 2, 286 (2011).
    • (2011) Nat. Commun. , vol.2 , pp. 286
    • Lee, S.J.1
  • 3
    • 84867092308 scopus 로고    scopus 로고
    • Bridging the mid-infrared-to-telecom gap with silicon nanophotonic spectral translation
    • Liu, X. et al. Bridging the mid-infrared-to-telecom gap with silicon nanophotonic spectral translation. Nat. Photonics 6, 667-671 (2012).
    • (2012) Nat. Photonics , vol.6 , pp. 667-671
    • Liu, X.1
  • 4
    • 84857923174 scopus 로고    scopus 로고
    • Understanding intermediate-band solar cells
    • Luque, A., Marti, A. & Stanley, C. Understanding intermediate-band solar cells. Nat. Photonics 6, 146-152 (2012).
    • (2012) Nat. Photonics , vol.6 , pp. 146-152
    • Luque, A.1    Marti, A.2    Stanley, C.3
  • 5
    • 79952179436 scopus 로고    scopus 로고
    • Photovoltaics: Towards the intermediate band
    • Luque, A. & Marti, A. Photovoltaics: towards the intermediate band. Nat. Photonics 5, 137-138 (2011).
    • (2011) Nat. Photonics , vol.5 , pp. 137-138
    • Luque, A.1    Marti, A.2
  • 6
    • 58049112884 scopus 로고    scopus 로고
    • Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain-bandwidth product
    • Kang, Y. et al. Monolithic germanium/silicon avalanche photodiodes with 340 GHz gain-bandwidth product. Nat. Photonics 3, 59-63 (2008).
    • (2008) Nat. Photonics , vol.3 , pp. 59-63
    • Kang, Y.1
  • 7
    • 77955206033 scopus 로고    scopus 로고
    • High-performance Ge-on-Si photodetectors
    • Michel, J., Liu, J. & Kimerling, L. C. High-performance Ge-on-Si photodetectors. Nat. Photonics 4, 527-534 (2010).
    • (2010) Nat. Photonics , vol.4 , pp. 527-534
    • Michel, J.1    Liu, J.2    Kimerling, L.C.3
  • 8
    • 77949675477 scopus 로고    scopus 로고
    • High quality Ge epitaxial layers in narrow channels on Si (001) substrates
    • Wang, G. et al. High quality Ge epitaxial layers in narrow channels on Si (001) substrates. Appl. Phys. Lett. 96, 111903 (2010).
    • (2010) Appl. Phys. Lett. , vol.96 , pp. 111903
    • Wang, G.1
  • 9
    • 84863723911 scopus 로고    scopus 로고
    • Dual-gated bilayer grapheme hot-electron bolometer
    • Yan, J. et al. Dual-gated bilayer grapheme hot-electron bolometer. Nat. Nanotechnol. 7, 472-478 (2012).
    • (2012) Nat. Nanotechnol. , vol.7 , pp. 472-478
    • Yan, J.1
  • 10
    • 33747992894 scopus 로고    scopus 로고
    • Infrared focal plane array incorporating silicon IC process compatible bolometer
    • Tanaka, A. et al. Infrared focal plane array incorporating silicon IC process compatible bolometer. IEEE T. Electron Dev. 43, 1844-1850 (1996).
    • (1996) IEEE T. Electron Dev. , vol.43 , pp. 1844-1850
    • Tanaka, A.1
  • 11
    • 78650281784 scopus 로고    scopus 로고
    • Near-infrared sub-band gap all-silicon photodetectors: State of the art and perspectives
    • Casalino, M., Coppola, G., Iodice, M., Rendina, I. & Sirleto, L. Near-infrared sub-band gap all-silicon photodetectors: state of the art and perspectives. Sensors 10, 10571-10600 (2010).
    • (2010) Sensors , vol.10 , pp. 10571-10600
    • Casalino, M.1    Coppola, G.2    Iodice, M.3    Rendina, I.4    Sirleto, L.5
  • 12
    • 21344469669 scopus 로고    scopus 로고
    • Silicon waveguide-integrated optical power monitor with enhanced sensitivity at 1550 nm
    • Bradley, J. D. B., Jessop, P. E. & Knights, A. P. Silicon waveguide-integrated optical power monitor with enhanced sensitivity at 1550 nm. Appl. Phys. Lett. 86, 241103 (2005).
    • (2005) Appl. Phys. Lett. , vol.86 , pp. 241103
    • Bradley, J.D.B.1    Jessop, P.E.2    Knights, A.P.3
  • 13
    • 84886947428 scopus 로고    scopus 로고
    • Silicon photonic resonatorenhanced defect-mediated photodiode for sub-bandgap detection
    • Doylend, J. K., Jessop, P. E. & Knights, A. P. Silicon photonic resonatorenhanced defect-mediated photodiode for sub-bandgap detection. Opt. Express 18, 14671-14678 (2010).
    • (2010) Opt. Express , vol.18 , pp. 14671-14678
    • Doylend, J.K.1    Jessop, P.E.2    Knights, A.P.3
  • 14
    • 84871658391 scopus 로고    scopus 로고
    • 10 Gb/s error-Free operation of all-Silicon ion-Implantedwaveguide photodiodes at 1.55 mm
    • Grote, R. R. et al. 10 Gb/s error-free operation of all-silicon ion-implantedwaveguide photodiodes at 1.55 mm. IEEE Photon. Techol. Lett. 25, 67-70 (2013).
    • (2013) IEEE Photon. Techol. Lett. , vol.25 , pp. 67-70
    • Grote, R.R.1
  • 17
    • 65249104896 scopus 로고    scopus 로고
    • Silicon waveguide infrared photodiodes with 435 GHz bandwidth and phototransistors with 50 AW-1 response
    • Geis, M. W. et al. Silicon waveguide infrared photodiodes with 435 GHz bandwidth and phototransistors with 50 AW-1 response. Opt. Express 17, 5193-5204 (2009).
    • (2009) Opt. Express , vol.17 , pp. 5193-5204
    • Geis, M.W.1
  • 18
    • 1642634570 scopus 로고    scopus 로고
    • Polydimethylsiloxane-based pattern transfer process for the post-IC integration of MEMS onto CMOS chips
    • Park, D. S.-W., Kim, K., Pillans, B. & Lee, J.-B. Polydimethylsiloxane-based pattern transfer process for the post-IC integration of MEMS onto CMOS chips. J. Micromech. Microeng. 14, 335-340 (2004).
    • (2004) J. Micromech. Microeng. , vol.14 , pp. 335-340
    • Park, D.S.-W.1    Kim, K.2    Pillans, B.3    Lee, J.-B.4
  • 19
    • 62649135120 scopus 로고    scopus 로고
    • Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies
    • Lopez, J. L. et al. Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies. J. Micromech. Microeng. 19, 015002 (2009).
    • (2009) J. Micromech. Microeng. , vol.19 , pp. 015002
    • Lopez, J.L.1
  • 20
    • 0029306789 scopus 로고
    • Optical properties of intrinsic silicon at 300 K
    • Green, M. A. & Keevers, M. J. Optical properties of intrinsic silicon at 300 K. Prog. Photovoltaics 3, 189-192 (1995).
    • (1995) Prog. Photovoltaics , vol.3 , pp. 189-192
    • Green, M.A.1    Keevers, M.J.2
  • 21
    • 23144463140 scopus 로고    scopus 로고
    • Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes
    • Carey, J. E., Crouch, C. H., Shen, M. & Mazur, E. Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes. Opt. Lett. 30, 1773-1775 (2005). (Pubitemid 41083726)
    • (2005) Optics Letters , vol.30 , Issue.14 , pp. 1773-1775
    • Carey, J.E.1    Crouch, C.H.2    Shen, M.3    Mazur, E.4
  • 22
    • 84866320596 scopus 로고    scopus 로고
    • Improved photoresponse characteristics in Se-doped Si photodiodes fabricated using picosecond pulsed laser mixing
    • Hu, S. et al. Improved photoresponse characteristics in Se-doped Si photodiodes fabricated using picosecond pulsed laser mixing. Semicond. Sci. Technol. 27, 102002 (2012).
    • (2012) Semicond. Sci. Technol. , vol.27 , pp. 102002
    • Hu, S.1
  • 23
    • 84868348468 scopus 로고    scopus 로고
    • The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation
    • Smith, M. J. et al. The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation. J. Appl. Phys. 112, 083518 (2012).
    • (2012) J. Appl. Phys. , vol.112 , pp. 083518
    • Smith, M.J.1
  • 25
    • 79960641752 scopus 로고    scopus 로고
    • Insulator-to-metal transition in sulfur-doped silicon
    • Winkler, M. T. et al. Insulator-to-metal transition in sulfur-doped silicon. Phys. Rev. Lett. 106, 178701 (2011).
    • (2011) Phys. Rev. Lett. , vol.106 , pp. 178701
    • Winkler, M.T.1
  • 26
    • 84855673920 scopus 로고    scopus 로고
    • Insulator-to-metal transition in selenium-hyperdoped silicon: Observation and origin
    • Ertekin, E. et al. Insulator-to-metal transition in selenium-hyperdoped silicon: observation and origin. Phys. Rev. Lett. 108, 026401 (2012).
    • (2012) Phys. Rev. Lett. , vol.108 , pp. 026401
    • Ertekin, E.1
  • 27
    • 84884964189 scopus 로고    scopus 로고
    • Methodology for vetting heavily doped semiconductors for intermediate band photovoltaics: A case study in sulfur-hyperdoped silicon
    • Sullivan, J. T. et al. Methodology for vetting heavily doped semiconductors for intermediate band photovoltaics: a case study in sulfur-hyperdoped silicon. J. Appl. Phys. 114, 103701 (2013).
    • (2013) J. Appl. Phys. , vol.114 , pp. 103701
    • Sullivan, J.T.1
  • 28
    • 84882237759 scopus 로고    scopus 로고
    • Ruling out the impact of defects on the below band gap photoconductivity of Ti supersaturated Si
    • Olea, J. et al. Ruling out the impact of defects on the below band gap photoconductivity of Ti supersaturated Si. J. Appl. Phys. 114, 053110 (2013).
    • (2013) J. Appl. Phys. , vol.114 , pp. 053110
    • Olea, J.1
  • 29
    • 84891767262 scopus 로고
    • Doped silicon and germanium photoconductors as targets for infrared television camera tubes
    • Redington, R. W. & van Heerden, P. J. Doped silicon and germanium photoconductors as targets for infrared television camera tubes. J. Opt. Soc. Am. 49, 997-1001 (1959).
    • (1959) J. Opt. Soc. Am. , vol.49 , pp. 997-1001
    • Redington, R.W.1    Van Heerden, P.J.2
  • 30
    • 0017416674 scopus 로고
    • Survey of dopants in silicon for 2-2.7 and 3-5 mm infrared detector application
    • Sclar, N. Survey of dopants in silicon for 2-2.7 and 3-5 mm infrared detector application. Infrared Phys. 17, 71-82 (1976).
    • (1976) Infrared Phys. , vol.17 , pp. 71-82
    • Sclar, N.1
  • 31
    • 84885406201 scopus 로고    scopus 로고
    • Supersaturating silicon with transition metals by ion implantation and pulsed laser melting
    • Recht, D. et al. Supersaturating silicon with transition metals by ion implantation and pulsed laser melting. J. Appl. Phys. 114, 124903 (2013).
    • (2013) J. Appl. Phys. , vol.114 , pp. 124903
    • Recht, D.1
  • 32
    • 36549092750 scopus 로고
    • Trapping of Au in Si during pulsed laser irradiation: A comparison with ion beam induced segregation
    • Priolo, F. et al. Trapping of Au in Si during pulsed laser irradiation: a comparison with ion beam induced segregation. Appl. Phys. Lett. 53, 2486-2488 (1988).
    • (1988) Appl. Phys. Lett. , vol.53 , pp. 2486-2488
    • Priolo, F.1
  • 35
    • 84933643121 scopus 로고
    • Solid solubilities of impurity elements in germanium and silicon
    • Trumbore, F. A. Solid solubilities of impurity elements in germanium and silicon. Bell Syst. Tech. J. 39, 205-233 (1960).
    • (1960) Bell Syst. Tech. J. , vol.39 , pp. 205-233
    • Trumbore, F.A.1
  • 36
    • 0001897072 scopus 로고
    • Enhanced gold solubility effect in heavily n-type silicon
    • Cagnina, S. F. Enhanced gold solubility effect in heavily n-type silicon. J. Electrochem. Soc. 116, 498-502 (1969).
    • (1969) J. Electrochem. Soc. , vol.116 , pp. 498-502
    • Cagnina, S.F.1
  • 38
    • 36749121934 scopus 로고
    • Growth interface breakdown during laser recrystallization from the melt
    • Cullis, A. G. et al. Growth interface breakdown during laser recrystallization from the melt. Appl. Phys. Lett. 38, 642-644 (1981).
    • (1981) Appl. Phys. Lett. , vol.38 , pp. 642-644
    • Cullis, A.G.1
  • 39
    • 80053992679 scopus 로고    scopus 로고
    • Soft X-ray emission spectroscopy studies of the electronic structure of silicon supersaturated with sulfur
    • Sullivan, J. T. et al. Soft X-ray emission spectroscopy studies of the electronic structure of silicon supersaturated with sulfur. Appl. Phys. Lett. 99, 142102 (2011).
    • (2011) Appl. Phys. Lett. , vol.99 , pp. 142102
    • Sullivan, J.T.1
  • 40
    • 36149015973 scopus 로고
    • Intrinsic optical absorption in single-crystal germanium and silicon at 77-K and 300-K
    • Dash, W. C. & Newman, R. Intrinsic optical absorption in single-crystal germanium and silicon at 77-K and 300-K. Phys. Rev. 99, 1151-1155 (1995).
    • (1995) Phys. Rev. , vol.99 , pp. 1151-1155
    • Dash, W.C.1    Newman, R.2
  • 42
    • 0000212079 scopus 로고
    • Homojunction internal photoemission far-infrared detectors: Photoresponse performance analysis
    • Perera, A. G. U., Yuan, H. X. & Francombe, M. H. Homojunction internal photoemission far-infrared detectors: photoresponse performance analysis. J. Appl. Phys. 77, 915-924 (1995).
    • (1995) J. Appl. Phys. , vol.77 , pp. 915-924
    • Perera, A.G.U.1    Yuan, H.X.2    Francombe, M.H.3
  • 43
    • 84869062206 scopus 로고    scopus 로고
    • Sub-band gap spectral photo-response analysis of Ti-supersaturated Si
    • Garca-Hemme, E. et al. Sub-band gap spectral photo-response analysis of Ti-supersaturated Si. Appl. Phys. Lett. 101, 192101 (2012).
    • (2012) Appl. Phys. Lett. , vol.101 , pp. 192101
    • Garca-Hemme, E.1
  • 44
    • 0033584804 scopus 로고    scopus 로고
    • Parametric generation of tunable light from continuous-wave to femtosecond pulses
    • Dunn, M. H. & Ebrahimzadeh, M. Parametric generation of tunable light from continuous-wave to femtosecond pulses. Science 286, 1513-1517 (1999).
    • (1999) Science , vol.286 , pp. 1513-1517
    • Dunn, M.H.1    Ebrahimzadeh, M.2
  • 45
    • 34248330426 scopus 로고    scopus 로고
    • Two-photon absorption and Kerr coefficients of silicon for 850-2200 nm
    • Bristow, A. D., Rotenberg, N. & van Driel, H. M. Two-photon absorption and Kerr coefficients of silicon for 850-2200 nm. Appl. Phys. Lett. 90, 191104 (2007).
    • (2007) Appl. Phys. Lett. , vol.90 , pp. 191104
    • Bristow, A.D.1    Rotenberg, N.2    Van Driel, H.M.3
  • 46
    • 11744365056 scopus 로고
    • Precise determination of the multiphonon and photon carrier generation properties using the impurity photovoltaic effect in semiconductors
    • Sah, C. T. & Tasch, Jr A. F. Precise determination of the multiphonon and photon carrier generation properties using the impurity photovoltaic effect in semiconductors. Phys. Rev. Lett. 19, 69-71 (1967).
    • (1967) Phys. Rev. Lett. , vol.19 , pp. 69-71
    • Sah, C.T.1    Tasch, Jr.A.F.2
  • 47
    • 4143093405 scopus 로고
    • Recombination properties of the gold acceptor level in silicon using the impurity photovoltaic effect
    • Sah, C. T., Tasch, Jr A. F. & Schroder, D. K. Recombination properties of the gold acceptor level in silicon using the impurity photovoltaic effect. Phys. Rev. Lett. 19, 71-72 (1967).
    • (1967) Phys. Rev. Lett. , vol.19 , pp. 71-72
    • Sah, C.T.1    Tasch, Jr.A.F.2    Schroder, D.K.3
  • 48
    • 51249181100 scopus 로고
    • Photoionization cross-sections and energy levels of gold, iron, platinum, silver, and titanium in silicon
    • Okuyama, M., Matsunaga, N., Chen, J.-W. & Milnes, A. G. Photoionization cross-sections and energy levels of gold, iron, platinum, silver, and titanium in silicon. J. Electron. Mater. 8, 501-515 (1979).
    • (1979) J. Electron. Mater. , vol.8 , pp. 501-515
    • Okuyama, M.1    Matsunaga, N.2    Chen, J.-W.3    Milnes, A.G.4
  • 49
    • 33748621800 scopus 로고
    • Statistics of the recombination of holes and electrons
    • Shockley, W. & Read, Jr W. T. Statistics of the recombination of holes and electrons. Phys. Rev. 87, 835-842 (1952).
    • (1952) Phys. Rev. , vol.87 , pp. 835-842
    • Shockley, W.1    Read, Jr.W.T.2
  • 50
    • 0016576617 scopus 로고
    • Electron and hole drift velocity measurements in silicon and their empirical relation to electric field and temperatures
    • Canali, C., Majni, G., Minder, R. & Ottaviani, G. Electron and hole drift velocity measurements in silicon and their empirical relation to electric field and temperatures. IEEE T. Electron. Dev. 22, 1045-1047 (1975).
    • (1975) IEEE T. Electron. Dev. , vol.22 , pp. 1045-1047
    • Canali, C.1    Majni, G.2    Minder, R.3    Ottaviani, G.4
  • 51
    • 0014798766 scopus 로고
    • Thermal and optical emission and capture rates and cross sections of electrons and holes at imperfection centers in semiconductors from photo and dark junction current and capacitance measurements
    • Sah, C. T., Forbes, L., Rosier, L. L. & Tasch, Jr A. F. Thermal and optical emission and capture rates and cross sections of electrons and holes at imperfection centers in semiconductors from photo and dark junction current and capacitance measurements. Solid State Electron. 13, 759-788 (1970).
    • (1970) Solid State Electron , vol.13 , pp. 759-788
    • Sah, C.T.1    Forbes, L.2    Rosier, L.L.3    Tasch, Jr.A.F.4
  • 52
    • 0007551939 scopus 로고
    • Electrical and optical properties of gold-doped n-type silicon
    • Weman, H., Henry, A., Begum, T. & Monemar, B. Electrical and optical properties of gold-doped n-type silicon. J. Appl. Phys. 65, 137-145 (1989).
    • (1989) J. Appl. Phys. , vol.65 , pp. 137-145
    • Weman, H.1    Henry, A.2    Begum, T.3    Monemar, B.4
  • 53
    • 0000338325 scopus 로고    scopus 로고
    • Properties of gold in silicon
    • Bullis, W. M. Properties of Gold in Silicon. Solid State Electron. 9, 143-169 (1996).
    • (1996) Solid State Electron , vol.9 , pp. 143-169
    • Bullis, W.M.1
  • 54
    • 0016070224 scopus 로고
    • Optical properties of gold acceptor and donor levels in silicon
    • Braun, S. & Grimmeiss, H. G. Optical properties of gold acceptor and donor levels in silicon. J. Appl. Phys. 45, 2658-2665 (1974).
    • (1974) J. Appl. Phys. , vol.45 , pp. 2658-2665
    • Braun, S.1    Grimmeiss, H.G.2
  • 56
    • 0016510879 scopus 로고
    • Spectral distribution of photoionization cross sections by photoconductivity measurements
    • Grimmeiss, H. G. & Ledebo, L.-A. Spectral distribution of photoionization cross sections by photoconductivity measurements. J. Appl. Phys. 46, 2155-2162 (1975).
    • (1975) J. Appl. Phys. , vol.46 , pp. 2155-2162
    • Grimmeiss, H.G.1    Ledebo, L.-A.2
  • 57
    • 0003433296 scopus 로고
    • Photo-ionization of deep impurity levels in semiconductors with non-parabolic bands
    • Grimmeiss, H. G. & Lebedo, L.-A. Photo-ionization of deep impurity levels in semiconductors with non-parabolic bands. J. Phys. C Solid State 8, 2615-2626 (1975).
    • (1975) J. Phys. C Solid State , vol.8 , pp. 2615-2626
    • Grimmeiss, H.G.1    Lebedo, L.-A.2
  • 58
    • 0000543163 scopus 로고
    • On the photoionization of deep impurity centers in semiconductors
    • Lucovsky, G. On the photoionization of deep impurity centers in semiconductors. Solid State Commun. 3, 299-302 (1965).
    • (1965) Solid State Commun. , vol.3 , pp. 299-302
    • Lucovsky, G.1
  • 59
    • 33947649632 scopus 로고
    • Auger recombination in silicon at low carrier densities
    • Yablonovitch, E. & Gmitter, T. Auger recombination in silicon at low carrier densities. Appl. Phys. Lett. 49, 587-589 (1986).
    • (1986) Appl. Phys. Lett. , vol.49 , pp. 587-589
    • Yablonovitch, E.1    Gmitter, T.2


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