Polydimethylsiloxane-based pattern transfer process for the post-IC integration of MEMS onto CMOS chips

Journal of Micromechanics and Microengineering

Volumn 14, Issue 3, 2004, Pages 335-340

  Park, Daniel Sang Won ^a   Kim, Kabseog ^a   Pillans, Brandon ^a   Lee, Jeong Bong ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PATTERN TRANSFER; SPIRAL INDUCTORS;

ACTUATORS; CMOS INTEGRATED CIRCUITS; ELECTRIC INDUCTORS; ELECTROPLATING; INDUCTANCE; MICROELECTRONICS; MICROPROCESSOR CHIPS; ORGANIC POLYMERS;

MICROELECTROMECHANICAL DEVICES;

EID: 1642634570     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/3/004     Document Type: Article

References (12)

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