Infrared focal plane array incorporating silicon IC process compatible bolometer

IEEE Transactions on Electron Devices

Volumn 43, Issue 11, 1996, Pages 18441850-

  Tanaka, Akio ^a   Matsumoto, Shouhei ^a   Tsukamoto, Nanao ^a   Itoh, Shigeyuki ^a   Chiba, Kazuhiro ^a   Endoh, Tsutomu ^a   Nakazato, Akihiro ^a   Okuyama, Kuniyuki ^a   Kumazawa, Yuichi ^a   Hijikawa, Minoru ^a   Gotoh, Hideki ^b   Tanaka, Takanori ^b   Teranishi, Nobukazu ^a  

^a NEC CORPORATION   (Japan)

^b Nippon Systemware Co Etd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33747992894     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. R. A. Wood, ''Uncooled thermal imaging with monolithic silicon focal planes," in Pine. SPIE, 1993, vol. 2020, pp. 322329.
2. M. H. Unewisse, S. J. Passmore, K. C. Eiddiard, and R. J. Watson, "Performance of uncooled semiconductor film bolometer infrared detectors," in Proc. SPIE. 1994, vol. 2269, pp. 4352.
3. I. H. Choi and K. D. Wise. "A siliconthermopilebased infrared sensing array for use in automated manufacturing," IEEE Trans. Electron. Devices, vol. ED33, pp. 7279, 1986.
4. H. Beratan, C. Ilanson, and E. G. Meissner, "Lowcost uncooled ferroelectric detector," in Prac. SPIE, 1994, vol. 2274, pp. 147156.
5. R. Watton, "Ferroelectric materials and IR bolometer arrays: From hybrid arrays toward integration," Integr. Ferroelectr., vol. 4, pp. 175186, 1994.
6. American Institute of Physics. American Institute of Physics Handbook. New York: MacGrawHill, 1982.
7. A. van der Ziel, "Unified presentation of 1/f noise in electronic devices: Fundamental 1/f noise sources," Proc. IEEE. vol. 76, pp. 233258, Mar. 19X8.
8. A. Tanaka, N. Teranishi, S. Itoh, and A. Nakazato, "Temperature characteristics and noise of polysilicon resistors and polysilicon diodes," (in Japanese) in EM. Alnlr. 54ih Autumn Mlg. Jpn. Sue. Appl. Phys., 1993, no. 1, p. 359.
9. A. S. Jensen, "Limitations to room temperature IR imaging systems,"in Proc. SPIE, 1994, vol. 2020, pp. 340350.
10. S. Borrello and Z. Celik Butler, "A 1/f noise model based on fluctuating defect states," SolidState Electron., vol. 36, no. 3, pp. 407410, 1993.