Two-dimensional carrier profiling of InP-based structures using scanning spreading resistance microscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1285-1288

  De Wolf, P ^a,c   Geva, M ^b   Reynolds, C L ^b   Hantschel, T ^a   Vandervorst, W ^a,d   Bylsma, R B ^b  

^a IMEC   (Belgium)

^b NOKIA RESEARCH CENTER   (United States)

^c Digital Instruments   (United States)

^d UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000643204     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581809     Document Type: Article

References (11)

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