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ESSCIRC 2004 - Proceedings of the 34th European Solid-State Device Research Conference

Volumn , Issue , 2004, Pages 101-104

High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy

(4) Eyben, P a,b Fukutome, H c Alvarez, D a,d Vandervorst, W a,b

a IMEC (Belgium)

b UNIVERSITY OF LEUVEN (Belgium)

c FUJITSU LABORATORIES LTD (Japan)

d INFINEON TECHNOLOGIES AG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; DIFFUSION; DOPING (ADDITIVES); FABRICATION; MICROSCOPIC EXAMINATION; MOSFET DEVICES; OPTICAL RESOLVING POWER; SCANNING TUNNELING MICROSCOPY; SILICON; TRANSISTORS;

CARRIER PROFILING; NITRIDATION; SCANNING SPREADING RESISTANCE MICROSCOPY (SSRM); SILICON NANO-DEVICES;

NANOTECHNOLOGY;

EID: 17644401400 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (3)

References (9)

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