Epitaxial staircase structure for the calibration of electrical characterization techniques

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 394-400

  Clarysse, T ^a   Caymax, M ^a   De Wolf, P ^a   Trenkler, T ^a   Vandervorst, W ^a   McMurray, J S ^b   Kim, J ^b   Williams, C C ^b   Clark, J G ^c   Neubauer, G ^c  

^a IMEC   (Belgium)

^b UNIVERSITY OF UTAH   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11644324194     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589820     Document Type: Article

References (12)

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