Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 1, 2002, Pages 471-478

  Eyben, P ^a   Xu, M ^a   Duhayon, N ^a   Clarysse, T ^a   Callewaert, S ^a   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; CHARGE CARRIERS; COMPUTER AIDED SOFTWARE ENGINEERING; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC CURRENTS; SEMICONDUCTOR JUNCTIONS;

SCANNING SPREADING RESISTANCE MICROSCOPY (SSRM);

SEMICONDUCTOR DEVICES;

EID: 0036124863     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1424280     Document Type: Conference Paper

References (13)