Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 749-754

  Hantschel, T ^a,b   Slesazeck, S ^a   Niedermann, P ^c   Eyben, P ^b   Vandervorst, W ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c CSEM   (Switzerland)

Author keywords

Atomic force microscopy (AFM); Diamond tip; Peel off; Probe; Pyramid

Indexed keywords

ATOMIC FORCE MICROSCOPY; FABRICATION; PROBES; SEMICONDUCTING SILICON;

METAL CANTILEVERS; SCANNING SPREADING RESISTANCE MICROSCOPY (SSRM);

SEMICONDUCTING DIAMONDS;

EID: 0035450381     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00556-1     Document Type: Article

References (7)