Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips

Applied Physics Letters

Volumn 82, Issue 11, 2003, Pages 1724-1726

  Alvarez D ^a,b,c   Hartwich, J ^a   Fouchier, M ^b   Eyben, P ^b,c   Vandervorst, W ^b,c  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING DIAMONDS; SILICON ON INSULATOR TECHNOLOGY;

SCANNING SPREADING RESISTANCE MICROSCOPY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0037451322     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1559931     Document Type: Article

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