Automated two-axes optical fiber alignment using grayscale technology

Journal of Microelectromechanical Systems

Volumn 16, Issue 1, 2007, Pages 102-110

  Morgan, Brian ^a   McGee, Jonathan ^a   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Comb drive actuators; Fiber alignment; Grayscale technology

Indexed keywords

ALIGNMENT; DRY ETCHING; LITHOGRAPHY; OPTOELECTRONIC DEVICES; SEMICONDUCTING SILICON;

COMB-DRIVE ACTUATORS; FIBER ALIGNMENT; GRAYSCALE TECHNOLOGY;

OPTICAL FIBERS;

EID: 33947211839     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.886035     Document Type: Article

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