Microball bearing technology for MEMS devices and integrated microsystems

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1789-1794

  Ghodssi, R ^a   Hanrahan, B ^a,b   Beyaz, M ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Microball bearing; Microsystems; Tribology

Indexed keywords

DESIGN CONSIDERATIONS; FRICTION AND WEAR; HYBRID STRUCTURE; INTEGRATED MICROSYSTEMS; MEMSDEVICES; MICRO BALL BEARINGS; MICROFABRICATED; MICROMACHINES; PACKAGING APPLICATIONS; TRANSDUCING;

ACTUATORS; SOLID STATE DEVICES; SOLID-STATE SENSORS; TRIBOLOGY;

MICROSYSTEMS;

EID: 80052115104     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969887     Document Type: Conference Paper

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