Three-dimensional microfabrication by localized electrochemical deposition

Journal of Microelectromechanical Systems

Volumn 5, Issue 1, 1996, Pages 24-32

  Madden, John D ^a,b   Hunter, Ian W ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; ELECTRODES; FABRICATION; HELICAL SPRINGS; METALS; NICKEL; PLATING; SEMICONDUCTING POLYMERS; SUBSTRATES; THREE DIMENSIONAL;

ELECTRICAL DISCHARGE MACHINING; ELECTROCHEMICAL DEPOSITION; EXCIMER LASER MACHINING; ION BEAM MILLING; LASER ASSISTED CHEMICAL VAPOR DEPOSITION; STEREO LITHOGRAPHY; THREE DIMENSIONAL MICROFABRICATION;

ELECTRODEPOSITION;

EID: 0030107346     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.485212     Document Type: Article

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