A microfabricated spiral-groove turbopump supported on microball bearings

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 99-109

  Waits, Christopher Mike ^a   McCarthy, Matthew ^b   Ghodssi, Reza ^c  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

Microelectromechanical systems (MEMS) bearings; Micropumps; Microturbines; Power MEMS; Turbopump

Indexed keywords

MICRO PUMP; MICRO TURBINE; MICROELECTROMECHANICAL SYSTEMS; POWER MEMS; TURBO PUMPS;

BEARINGS (STRUCTURAL); MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; PUMPS; STAINLESS STEEL; TURBINE PUMPS; TURBINES;

COMPOSITE MICROMECHANICS;

EID: 76349098212     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2035525     Document Type: Article

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