Off-the-shelf MEMS for rotary MEMS

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 579-582

  Hanrahan, B ^a,b   Feldman, J ^a   Misra, S ^a   Waits, C M ^b   Mitcheson, P D ^c   Ghodssi, R ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

^c IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEVICE PERFORMANCE; FEEDBACK SYSTEMS; HIGH SENSITIVITY; IN-SITU; MEMS ACCELEROMETER; MEMSDEVICES; MONITOR SYSTEM; MULTIMODAL SENSOR; ON CHIPS; OPERATIONAL LIFETIME; OPTICAL DISPLACEMENT SENSOR; ROTOR INSTABILITY; ROTOR SPEED; SENSOR SUITE; SPEED RANGE; VIBRATION SENSING; WIDE BANDWIDTH;

ACCELEROMETERS; SENSORS;

MEMS;

EID: 84860451957     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170241     Document Type: Conference Paper

References (7)

1. M. Mehregany, et al., "Principles In Design And Microfabrication Of Variable-Capacitance Side-Drive Motors," Journal Of Vacuum Science & Technology A-Vacuum Surfaces And Films, vol. 8, pp. 3614-24, Jul-Aug 1990.
2. Q. Hongwei, et al., "A single-crystal silicon 3-axis CMOS-MEMS accelerometer," in Proceedings of IEEE Sensors, 2004, pp. 661-4
3. L. G. Frechette, et al., "High-speed microfabricated silicon turbomachinery and fluid film bearings," Journal Of Microelectromechanical Systems, vol. 14, pp. 141-52, Feb 2005.
4. M. McCarthy, et al., "A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance," Journal Of Micromechanics And Microengineering, vol. 19, Sep 2009.
5. T. Murakoshi, et al., "Electrostatically Levitated Ring-Shaped Rotational-Gyro/Accelerometer," Japanese Journal of Applied Physics, vol. 42, pp. 2468-72 2003.
6. B. Hanrahan, et al., "A New Performance Regime for Microfabricated Ball Bearings," in Proceedings of PowerMEMS 2010, Leuven, Belgium, 2010, pp. 191-4.
7. R. Ghodssi, et al., "Microball Bearing Technology for MEMS Devices and Integrated Microsystems," in Proceedings of 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers 2011), Beijing, China, 2011, pp. 1789-94.