SCOPUS 정보 검색 플랫폼

Volumn 550, Issue , 2014, Pages 272-277

Microstructure characterization of nano-structured Cr/Cr2N multilayer films produced through radio frequency magnetron sputtering

(4) Marulanda, D M a Lousa, A b Martinez De Olcoz, L b Olaya, J J c

a CENTRO DE INVESTIGACIONES (Colombia)

b UNIVERSITY OF BARCELONA (Spain)

c UNIVERSIDAD NACIONAL DE COLOMBIA (Colombia)

Author keywords

Multilayers; r.f. magnetron sputtering; Resistivity; X ray reflectivity; A15

Indexed keywords

CRYSTALLITE SIZE; MAGNETRON SPUTTERING; MULTILAYER FILMS; NITROGEN COMPOUNDS; RADIO WAVES; REFLECTION; X RAY DIFFRACTION;

BI-LAYER; LOW RESISTIVITY; MICROSTRUCTURE CHARACTERIZATION; MULTILAYERS FILMS; NANO-STRUCTURED; R.F. MAGNETRON SPUTTERING; RESISTIVITY; RF-MAGNETRON SPUTTERING; X RAY REFLECTIVITY; Δ-A15;

MULTILAYERS;

EID: 84890309682 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.11.016 Document Type: Article

Times cited : (6)

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