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Volumn 398, Issue 399, 2001, Pages 490-495
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Stress and structure profiles for chromium nitride coatings deposited by r.f. magnetron sputtering
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Author keywords
Chromium nitride; r.f. magnetron sputtering; Stress profiles
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Indexed keywords
CHROMATE COATINGS;
CHROMIUM COMPOUNDS;
COMPRESSIVE STRESS;
CRYSTAL MICROSTRUCTURE;
CRYSTALLINE MATERIALS;
DEPOSITION;
ENERGY DISPERSIVE SPECTROSCOPY;
MAGNETRON SPUTTERING;
SCANNING ELECTRON MICROSCOPY;
SCANNING TUNNELING MICROSCOPY;
SEMICONDUCTING SILICON;
SUBSTRATES;
WAVELENGTH DISPERSIVE SPECTROSCOPY;
X RAY DIFFRACTION ANALYSIS;
COLUMNAR STRUCTURES;
THIN FILMS;
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EID: 18244412509
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)01435-3 Document Type: Article |
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Times cited : (50)
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References (12)
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