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Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 338-343

Period dependence of hardness and microstructure on nanometric Cr/CrN multilayers

(3) Romero, J a Esteve, J a Lousa, A a

a UNIVERSITY OF BARCELONA (Spain)

Author keywords

Chromium; Chromium nitride; Multilayers; Nanoindentation; Reactive sputtering

Indexed keywords

CHROMIUM; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

MULTILAYER HARDNESS; NANOIDENTATION MEASUREMENTS; POLYCRYSTALLINE CR/CRN MULTILAYERS; SILICON SUBSTRATES;

MULTILAYERS;

COATING;

EID: 14644397277 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.058 Document Type: Article

Times cited : (65)

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