Chromium film deposition stimulated by nitrogen ion implantation with energies up to 30 keV

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 1248-1252

  Guglya, A ^a   Marchenko, I ^b   Nekludov, I ^a  

^a KHARKOV INSTITUTE OF PHYSICS AND TECHNOLOGY   (Ukraine)

^b Scientific Center of Physical Technologies Kharkiv   (Ukraine)

Author keywords

Chromium; Ion assisted deposition; Resistivity; Thin films

Indexed keywords

ELECTRIC RESISTANCE; ION IMPLANTATION; POLYCRYSTALLINE MATERIALS; SUBSTRATES;

FILM DEPOSITION;

CHROMIUM PLATING;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18144438600     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00605-4     Document Type: Article

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