On the quality of quality-factor in gap-closing electrostatic resonators

Journal of Micromechanics and Microengineering

Volumn 23, Issue 11, 2013, Pages

  Shmulevich, Shai ^a   Lerman, Michael ^a   Elata, David ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTIC EXPRESSIONS; LOGARITHMIC DECREMENT; MEMS RESONATORS; PEAK GAIN; QUALITY FACTORS; TEST DEVICE; UNLOADED SYSTEM;

DYNAMIC RESPONSE; MICROELECTROMECHANICAL DEVICES; POWER INDUCTORS; RESONATORS;

ELECTROSTATICS;

EID: 84887108207     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/11/115010     Document Type: Article

References (35)

1. Nathanson H C, Newell W E, Wickstrom R A and Davis J R 1967 The resonant gate transistor IEEE Trans. Electron Devices 14 117-33
2. Howe R T 1981 An evaluation of surface-acoustic-wave and cantilever-beam oscillators for integrated organic-vapor sensors MSc Thesis Department of Electrical Engineering and Computer Sciences, University of California, Berkeley
3. Howe R T and Muller R S 1984 Integrated resonant-microbridge vapor sensor presented at IEEE Int. Electron Devices Meeting (San Francisco,) pp 213-7
4. Tang W C, Nguyen T H and Howe R T 1989 Laterally driven polysilicon resonant microstructures Sensors Actuators 20 25-32 (Pubitemid 20638048)
5. Bannon F D, Clark J R and Nguyen C T-C 2000 High-Q HF microelectromechanical filters IEEE J. Solid-State Circuits 35 512-26
6. Candler R N, Park W-T, Li H, Yama G, Partridge A, Lutz M and Kenny T W 2003 Single wafer encapsulation of MEMS devices IEEE Trans. Adv. Packag. 26 227-32
7. Wang J, Butler J E, Feygelson T and Nguyen C T-C 2004 1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support presented at MEMS'04: IEEE Int. Conf. on Micro Electro Mechanical Systems (Maastricht, The Netherlands,) pp 641-4
8. Wang J, Ren Z and Nguyen C T-C 2004 1.156-GHz self-aligned vibrating micromechanical disk resonator IEEE Trans. Ultrason. Ferroelectr. Freq. Control 51 1607-28 (Pubitemid 40136189)
9. Demirci M U and Nguyen C T-C 2006 Mechanically corner-coupled square microresonator array for reduced series motional resistance IEEE J. Microelectromech. Syst. 15 1419-36 (Pubitemid 44921760)
10. Weinstein D, Bhave S A, Tada M, Mitarai S and Morita S 2007 Mechanical coupling of 2D resonator arrays for MEMS filter applications presented at IEEE Int. Frequency Control Symp. pp 1362-5
11. Durand C, Casset F, Ancey P, Judong F, Talbot A, Quenouillere R, Renaud D, Borel S, Florin B and Buchaillot L 2008 Silicon on nothing MEMS electromechanical resonator Microsyst. Technol. 14 1027-33
12. Salvia J C, Melamud R, Chandorkar S A, Lord S F and Kenny T W 2010 Real-time temperature compensation of MEMS oscillators using an integrated micro-oven and a phase-locked loop IEEE J. Microelectromech. Syst. 19 192-201
13. Akgul M, Ren Z and Nguyen C T-C 2011 Voltage-controlled tuning to optimize MEMS resonator array-composite output power presented at IEEE Int. Conf. Frequency Control European Frequency and Time Forum pp 1-6
14. Lin L, Nguyen C T-C, Howe R T and Pisano A P 1992 Microelectromechanical filters for signal processing presented at MEMS'92: IEEE Proc. Micro Electro Mechanical Systems (Travemunde, Germany,) pp 226-31 (Pubitemid 23562075)
15. Nguyen C T-C and Howe R T 1992 Quality factor control for micromechanical resonators presented at IEEE Int. Electron Devices Meeting (San Francisco,) pp 505-8
16. Nguyen C T-C 2004 Vibrating RF MEMS for next generation wireless applications presented at Proc. IEEE Custom Integrated Circuits Conf. pp 257-64 (Pubitemid 40494086)
17. Tilmans H A C 1993 Micro-Mechanical Sensors Using Encapsulated Built-In Resonant Strain Gauges (Enschede: Febodruk)
18. Rinaldi M, Zuniga C, Sinha N, Taheri M, Piazza G, Khamis S M and Johnson A T 2008 Gravimetric chemical sensor based on the direct integration of SWNTS on ALN contour-mode MEMS resonators presented at IEEE Int. Frequency Control Symp. pp 443-8
19. Sarioglu A F, Liu M Z and Solgaard O 2011 High-resolution nanomechanical mapping using interferometric-force-sensing AFM probes IEEE J. Microelectromech. Syst. 20 654-64
20. Acar C and Shkel A M 2006 Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator IEEE J. Microelectromech. Syst. 15 380-7
21. Acar C and Shkel A 2008 MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness (New York: Springer)
22. Trusov A, Prikhodko I, Zotov S and Shkel A 2011 Low-dissipation silicon MEMS tuning fork gyroscopes for rate and whole angle measurements IEEE Sensors J. 11 2763-70
23. Nguyen C T C 2007 MEMS technology for timing and frequency control IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54 251-70
24. Serrano D E, Tabrizian R and Ayazi F 2011 Tunable piezoelectric MEMS resonators for real-time clock presented at IEEE Int. Conf. Frequency Control and European Frequency and Time Forum (San Francisco, CA,) pp 1-4
25. Kaajakari V, Mattila T, Oja A, Kiihamaki J, Kattelus H, Koskenvuori M, Rantakari P, Tittonen I and Seppa H 2003 Square-extensional mode single-crystal silicon micromechanical RF-resonator presented at TRANSDUCERS: IEEE Int. Conf. on Solid-State Sensors and Actuators (Boston, MA,) pp 951-4
26. Agache V, Legrand B, Collard D, Fujita H and Buchaillot L 2005 1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers presented at MEMS'05: IEEE Int. Conf. on Micro Electro Mechanical Systems (Miami, FL,) pp 121-4 (Pubitemid 41462313)
27. Khine L, Palaniapan M and Wong W-K 2007 6 Mhz bulk-mode resonator with Q values exceeding one million presented at TRANSDUCERS: IEEE Int. Conf. on Solid-State Sensors and Actuators (Lyon, France,) pp 2445-8
28. Putty M W, Chang S C, Howe R T, Robinson A L and Wise K D 1989 One-port active polysilicon resonant microstructures presented at MEMS'89: IEEE Micro Electro Mechanical Syytems Proc. (Salt Lake City, UT,) pp 60-65
29. Hsu W-T, Clark J R and Nguyen C T-C 2001 Q-optimized lateral free-free beam micromechanical resonators presented at TRANSDUCERS: IEEE Int. Conf. on Solid-State Sensors and Actuators (Munich, Germany,) pp 1110-3
30. Lin A T H, Lee J E Y, Yan J and Seshia A A 2010 Methods for enhanced electrical transduction and characterization of micromechanical resonators Sensors Actuators A 158 263-72
31. Senturia S D 2001 Microsystem Design (Boston: Kluwer)
32. Pelesko J A and Bernstein D H 2003 Modeling MEMS and NEMS (Boca Raton, FL: Chapman and Hall/CRC)
33. Leus V and Elata D 2008 On the dynamic responses of electrostatic MEMS switches J. Microelectromech. Syst. 17 236-43 (Pubitemid 351343937)
34. Senturia S D 2001 Microsystem Design (Boston: Kluwer)
35. Elata D 2006 Modeling the electromechanical response of electrostatic actuators Sensors Actuators (MEMS/NEMS: Handbook Techniques and Applications vol 4) ed C T Leondes (New York: Springer) pp 93-119