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Volumn 14, Issue 7, 2008, Pages 1027-1033

Silicon on nothing MEMS electromechanical resonator

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; ANTENNAS; ELECTRIC POWER UTILIZATION; ELECTROMECHANICAL DEVICES; FINITE ELEMENT METHOD; MEMS; OSCILLATORS (ELECTRONIC); PHOTOLITHOGRAPHY; SILICON;

EID: 44249103990     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0485-z     Document Type: Conference Paper
Times cited : (14)

References (12)
  • 1
    • 85008048107 scopus 로고    scopus 로고
    • High-Q HF Microelectromechanical Filters
    • 4
    • Bannon FD et al (2000) High-Q HF Microelectromechanical Filters. IEEE J Solid State Circuits 35(4):512-526
    • (2000) IEEE J Solid State Circuits , vol.35 , pp. 512-526
    • Bannon, F.D.1
  • 2
    • 44249115650 scopus 로고    scopus 로고
    • Active post processing method to increase the electro mechanical coupling in microresonators
    • Koskenvuori M et al (2002) Active post processing method to increase the electro mechanical coupling in microresonators. Eurosensors
    • (2002) Eurosensors
    • Koskenvuori, M.1
  • 3
    • 52649124720 scopus 로고    scopus 로고
    • Square-extensional mode single crystal silicon micromechanical RF resonator
    • Kaajakai V et al (2003) Square-extensional mode single crystal silicon micromechanical RF resonator. Transducers
    • (2003) Transducers
    • Kaajakai, V.1
  • 4
    • 20344404949 scopus 로고    scopus 로고
    • High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology
    • Pourkamali S et al (2004) High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS Technology. IEEE Tropical Meeting on Silicon Monolithic Integrated in RF Systems
    • (2004) IEEE Tropical Meeting on Silicon Monolithic Integrated in RF Systems
    • Pourkamali, S.1
  • 5
    • 33847113727 scopus 로고    scopus 로고
    • 1.51 GHz nanocrystalline diamond micromechanical disk resonator with material mismatched isolating support
    • Jing W et al (2004) 1.51 GHz nanocrystalline diamond micromechanical disk resonator with material mismatched isolating support. MEMS Conference
    • (2004) MEMS Conference
    • Jing, W.1
  • 9
    • 15544384589 scopus 로고    scopus 로고
    • Comparison of RSG-MOSFET and capacitive MEMS resonator detection
    • 5
    • Abelé N et al (2005) Comparison of RSG-MOSFET and capacitive MEMS resonator detection. IEEE Electron Lett 41(5):242-244
    • (2005) IEEE Electron Lett , vol.41 , pp. 242-244
    • Abelé, N.1
  • 12
    • 33846967830 scopus 로고    scopus 로고
    • Isotropic etching of Si1-xGex buried layers selectively to Si for the realization of advanced devices
    • Borel S et al (2006) Isotropic etching of Si1-xGex buried layers selectively to Si for the realization of advanced devices. ECS
    • (2006) ECS
    • Borel, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.