High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology
Pourkamali S et al (2004) High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS Technology. IEEE Tropical Meeting on Silicon Monolithic Integrated in RF Systems
Vibrating micromechanical resonator with solid dielectric capacitive transducer gaps
Yu-Wei L et al (2005) Vibrating micromechanical resonator with solid dielectric capacitive transducer gaps. IEEE international frequency control/precision time and time interval symposium
2D ultrashallow junction characterization of MOSFET with strained silicon
Wang XD et al (2004) 2D ultrashallow junction characterization of MOSFET with strained silicon. In: Proceedings of the seventh international workshop on the fabrication, characterization, and modeling of ultra-shallow doping profiles in semiconductors. JVST B22(1):373-376