High-resolution nanomechanical mapping using interferometric-force-sensing AFM probes

Journal of Microelectromechanical Systems

Volumn 20, Issue 3, 2011, Pages 654-664

  Sarioglu, Ali Fatih ^a   Liu, Maozi ^b   Solgaard, Olav ^a  

^a STANFORD UNIVERSITY   (United States)

^b AGILENT LABORATORIES   (United States)

Author keywords

Atomic force microscopy (AFM); cantilever probes; diffraction grating; force sensor; higher harmonic imaging; optical interferometry; tapping mode AFM (TM AFM); time resolved force measurement

Indexed keywords

CANTILEVER PROBE; FORCE SENSOR; HIGHER HARMONICS; OPTICAL INTERFEROMETRY; TAPPING MODES; TIME-RESOLVED;

BANDWIDTH; FORCE MEASUREMENT; INTERFEROMETRY; NANOCANTILEVERS; PHOTOLITHOGRAPHY; PROBES; SENSORS;

ATOMIC FORCE MICROSCOPY;

EID: 79958018060     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2127452     Document Type: Article

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