Low-dissipation silicon tuning fork gyroscopes for rate and whole angle measurements

IEEE Sensors Journal

Volumn 11, Issue 11, 2011, Pages 2763-2770

  Trusov, Alexander A ^a   Prikhodko, Igor P ^a   Zotov, Sergei A ^a   Shkel, Andrei M ^a  

^a University of California at Irvine   (United States)

Author keywords

Energy dissipation; microelectromechanical systems (MEMS) gyroscope; quality factor; rate integrating; vacuum packaging; whole angle

Indexed keywords

ANGLE OF ROTATION; ANGULAR RATE; DYNAMIC RANGE; INERTIAL GUIDANCE; MECHANICAL ARCHITECTURE; MICROMACHINED DEVICES; OPERATIONAL FREQUENCY; Q-FACTORS; QUALITY FACTOR; RATE INTEGRATING; TUNING FORK GYROSCOPES; VACUUM PACKAGING; WHOLE ANGLE;

ANGLE MEASUREMENT; COMPOSITE MICROMECHANICS; DAMPING; ENERGY DISSIPATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT; QUARTZ; VACUUM; VACUUM APPLICATIONS;

GYROSCOPES;

EID: 80054932160     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2011.2160338     Document Type: Article

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