Methods for enhanced electrical transduction and characterization of micromechanical resonators

Sensors and Actuators, A: Physical

Volumn 158, Issue 2, 2010, Pages 263-272

  Lin, A T H ^a   Lee, J E Y ^a,b   Yan, J ^a   Seshia, A A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Bulk mode resonators; Harmonic driving; Piezoresistive sensing

Indexed keywords

ACOUSTIC MODE; ANALYTICAL MODEL; BULK-MODE; CAPACITIVE PARASITICS; CMOS-MEMS; CURRENT RATIOS; DETECTION TECHNIQUE; ELECTRICAL TRANSDUCTION; ELECTROSTATICALLY DRIVEN; FABRICATED DEVICE; FEED THROUGH; HYBRID TECHNOLOGY; IV CHARACTERISTICS; LOW VOLTAGES; MEMS PROCESS; MICROMECHANICAL RESONATOR; OPERATING VOLTAGE; PIEZORESISTIVE DETECTION; PIEZORESISTIVE SENSING; SECOND HARMONICS; SIGNAL OUTPUT; SILICON RESONATORS; SQUARE-EXTENSIONAL MODES;

BACTERIOPHAGES; COMPUTER SIMULATION; HARMONIC ANALYSIS; MEMS; MICROELECTROMECHANICAL DEVICES; MODELS;

RESONATORS;

EID: 77949278256     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.01.024     Document Type: Article

References (7)

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