Mechanics of catalyst motion during metal assisted chemical etching of silicon

Journal of Physical Chemistry C

Volumn 117, Issue 40, 2013, Pages 20802-20809

  Lai, Chang Quan ^a   Cheng, He ^a   Choi, W K ^a,b   Thompson, Carl V ^a,c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHED NANOSTRUCTURES; EXPERIMENTAL CHARACTERIZATION; GEOMETRICAL CHARACTERISTICS; MECHANICAL CONSTRAINTS; METAL-ASSISTED CHEMICAL ETCHING; METAL-SILICON INTERFACES; NOBLE METAL CATALYSTS; SOLUTION CHEMISTRY;

CATALYSTS; MECHANICAL PROPERTIES; METALS; NANOSTRUCTURES; PRECIOUS METALS; SILICON;

ETCHING;

EID: 84885602742     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp407561k     Document Type: Article

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