-
2
-
-
81155144594
-
Temperature-dependence of ink transport during thermal dip-pen nanolithography
-
S. Chung, J.R. Felts, D. Wang, W.P. King, and J.J. De Yoreo Temperature-dependence of ink transport during thermal dip-pen nanolithography Appl Phys Lett 99 2011 193101 193103
-
(2011)
Appl Phys Lett
, vol.99
, pp. 193101-193103
-
-
Chung, S.1
Felts, J.R.2
Wang, D.3
King, W.P.4
De Yoreo, J.J.5
-
3
-
-
67651177764
-
ZResists for sub-20-nm electron beam lithography with a focus on HSQ: State of the art
-
A.E. Grigorescu, and C.W. Hagen ZResists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art Nanotechnology 20 2009 292001 292031
-
(2009)
Nanotechnology
, vol.20
, pp. 292001-292031
-
-
Grigorescu, A.E.1
Hagen, C.W.2
-
4
-
-
0037207675
-
Fabrication of Si single-electron transistors with precise dimensions by electron-beam nanolithography
-
H. Namatsu, Y. Watanabe, K. Yamazaki, T. Yamaguchi, M. Nagase, and Y. Ono Fabrication of Si single-electron transistors with precise dimensions by electron-beam nanolithography J Vac Sci Technol B 21 2003 1 5
-
(2003)
J Vac Sci Technol B
, vol.21
, pp. 1-5
-
-
Namatsu, H.1
Watanabe, Y.2
Yamazaki, K.3
Yamaguchi, T.4
Nagase, M.5
Ono, Y.6
-
5
-
-
32244440847
-
Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography
-
Y. Hirai, S. Hafizovic, N. Matsuzuka, J.G. Korvink, and O. Tabata Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography J Microelectromech S 15 2006 159 168
-
(2006)
J Microelectromech S
, vol.15
, pp. 159-168
-
-
Hirai, Y.1
Hafizovic, S.2
Matsuzuka, N.3
Korvink, J.G.4
Tabata, O.5
-
6
-
-
0037995442
-
Nanotechnology with soft materials
-
I.W. Hamley Nanotechnology with soft materials Angew Chem Int Edit 42 2003 1692 1712
-
(2003)
Angew Chem Int Edit
, vol.42
, pp. 1692-1712
-
-
Hamley, I.W.1
-
7
-
-
77955713993
-
Directed self-Assembly: Expectations and achievements
-
P. Kumar Directed self-Assembly: expectations and achievements Nanoscale Res Lett 5 2010 1367 1376
-
(2010)
Nanoscale Res Lett
, vol.5
, pp. 1367-1376
-
-
Kumar, P.1
-
8
-
-
49149109959
-
Challenges and breakthroughs in recent research on self-Assembly
-
K. Ariga, J.P. Hill, M.V. Lee, A. Vinu, R. Charvet, and S. Acharya Challenges and breakthroughs in recent research on self-Assembly Sci Technol Adv Mater 9 2008 014109
-
(2008)
Sci Technol Adv Mater
, vol.9
, pp. 014109
-
-
Ariga, K.1
Hill, J.P.2
Lee, M.V.3
Vinu, A.4
Charvet, R.5
Acharya, S.6
-
9
-
-
33646703470
-
Block copolymer lithography: Merging "bottom-up" with "top-down" processes
-
C.J. Hawker, and T.P. Russell Block copolymer lithography: merging "bottom-up" with "top-down" processes MRS Bull 30 2005 952 966
-
(2005)
MRS Bull
, vol.30
, pp. 952-966
-
-
Hawker, C.J.1
Russell, T.P.2
-
10
-
-
34250642011
-
Nanoimprint lithography: Methods and material requirements
-
L.J. Guo Nanoimprint lithography: methods and material requirements Adv Mater 19 2007 495 513
-
(2007)
Adv Mater
, vol.19
, pp. 495-513
-
-
Guo, L.J.1
-
11
-
-
18044384992
-
New approaches to nanofabrication: Molding, printing, and other techniques
-
B.D. Gates, Q. Xu, M. Stewart, D. Ryan, C.G. Willson, and G.M. Whitesides New approaches to nanofabrication: molding, printing, and other techniques Chem Rev 105 2005 1171 1196
-
(2005)
Chem Rev
, vol.105
, pp. 1171-1196
-
-
Gates, B.D.1
Xu, Q.2
Stewart, M.3
Ryan, D.4
Willson, C.G.5
Whitesides, G.M.6
-
12
-
-
2342530489
-
Nanowire arrays defined by nanoimprint lithography
-
T. Mårtensson, P. Carlberg, M. Borgström, L. Montelius, W. Seifert, and L. Samuelson Nanowire arrays defined by nanoimprint lithography Nano Lett 4 2004 699 702
-
(2004)
Nano Lett
, vol.4
, pp. 699-702
-
-
Mårtensson, T.1
Carlberg, P.2
Borgström, M.3
Montelius, L.4
Seifert, W.5
Samuelson, L.6
-
13
-
-
3242676271
-
Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography
-
M.D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, and D. Wasserman Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography Appl Phys Lett 84 2004 5299 5301
-
(2004)
Appl Phys Lett
, vol.84
, pp. 5299-5301
-
-
Austin, M.D.1
Ge, H.2
Wu, W.3
Li, M.4
Yu, Z.5
Wasserman, D.6
-
14
-
-
4644288208
-
Ordered block-copolymer assembly using nanoimprint lithography
-
H.-W. Li, and W.T.S. Huck Ordered block-copolymer assembly using nanoimprint lithography Nano Lett 4 2004 1633 1636
-
(2004)
Nano Lett
, vol.4
, pp. 1633-1636
-
-
Li, H.-W.1
Huck, W.T.S.2
-
15
-
-
79954607730
-
Plasma etch technologies for the development of ultra-small feature size transistor devices
-
D. Borah, M.T. Shaw, S. Rasappa, R.A. Farrell, C.T. O'Mahony, and C.M. Faulkner Plasma etch technologies for the development of ultra-small feature size transistor devices J Phys D Appl Phys 44 2011 174012 174024
-
(2011)
J Phys D Appl Phys
, vol.44
, pp. 174012-174024
-
-
Borah, D.1
Shaw, M.T.2
Rasappa, S.3
Farrell, R.A.4
O'Mahony, C.T.5
Faulkner, C.M.6
-
16
-
-
79951897916
-
Surface-directed dewetting of a block copolymer for fabricating highly uniform nanostructured microdroplets and concentric nanorings
-
R.A. Farrell, N. Kehagias, M.T. Shaw, V. Reboud, M. Zelsmann, and J.D. Holmes Surface-directed dewetting of a block copolymer for fabricating highly uniform nanostructured microdroplets and concentric nanorings ACS Nano 5 2011 1073 1085
-
(2011)
ACS Nano
, vol.5
, pp. 1073-1085
-
-
Farrell, R.A.1
Kehagias, N.2
Shaw, M.T.3
Reboud, V.4
Zelsmann, M.5
Holmes, J.D.6
-
17
-
-
84255189903
-
Direct top-down ordering of diblock copolymers through nanoimprint lithography
-
M. Salaün, N. Kehagias, B. Salhi, T. Baron, J. Boussey, and C.M. Sotomayor Torres Direct top-down ordering of diblock copolymers through nanoimprint lithography J Vac Sci Technol B 29 2011 06F208-12
-
(2011)
J Vac Sci Technol B
, vol.29
-
-
Salaün, M.1
Kehagias, N.2
Salhi, B.3
Baron, T.4
Boussey, J.5
Sotomayor Torres, C.M.6
-
18
-
-
79955549708
-
Ordered nanostructure of PS-b-PEO copolymer by solvent annealing with mixture of benzene/water vapor and its micropattern fabrication
-
T.H. Kim, J. Hwang, H. Acharya, and C. Park Ordered nanostructure of PS-b-PEO copolymer by solvent annealing with mixture of benzene/water vapor and its micropattern fabrication J Nanosci Nanotechnol 10 2010 6883 6887
-
(2010)
J Nanosci Nanotechnol
, vol.10
, pp. 6883-6887
-
-
Kim, T.H.1
Hwang, J.2
Acharya, H.3
Park, C.4
-
19
-
-
77950544949
-
Perpendicular orientation of cylindrical domains upon solvent annealing thin films of polystyrene-b-polylactide
-
M. Vayer, M.A. Hillmyer, M. Dirany, G. Thevenin, R. Erre, and C. Sinturel Perpendicular orientation of cylindrical domains upon solvent annealing thin films of polystyrene-b-polylactide Thin Solid Films 518 2010 3710 3715
-
(2010)
Thin Solid Films
, vol.518
, pp. 3710-3715
-
-
Vayer, M.1
Hillmyer, M.A.2
Dirany, M.3
Thevenin, G.4
Erre, R.5
Sinturel, C.6
-
20
-
-
81855172058
-
Sub-10 nm nanofabrication via nanoimprint directed self-Assembly of block copolymers
-
S.M. Park, X. Liang, B.D. Harteneck, T.E. Pick, N. Hiroshiba, and Y. Wu Sub-10 nm nanofabrication via nanoimprint directed self-Assembly of block copolymers ACS Nano 5 2011 8523 8531
-
(2011)
ACS Nano
, vol.5
, pp. 8523-8531
-
-
Park, S.M.1
Liang, X.2
Harteneck, B.D.3
Pick, T.E.4
Hiroshiba, N.5
Wu, Y.6
-
21
-
-
72449120282
-
Strongly segregated cubic microdomain morphology consistent with the double gyroid phase in high molecular weight diblock copolymers of polystyrene and poly(dimethylsiloxane)
-
N. Politakos, E. Ntoukas, A. Avgeropoulos, V. Krikorian, B.D. Pate, and E.L. Thomas Strongly segregated cubic microdomain morphology consistent with the double gyroid phase in high molecular weight diblock copolymers of polystyrene and poly(dimethylsiloxane) J Poly Sci Part B Polym Phys 47 2009 2419 2427
-
(2009)
J Poly Sci Part B Polym Phys
, vol.47
, pp. 2419-2427
-
-
Politakos, N.1
Ntoukas, E.2
Avgeropoulos, A.3
Krikorian, V.4
Pate, B.D.5
Thomas, E.L.6
-
22
-
-
84875718900
-
Sub-10 nm feature size PS-b-PDMS block copolymer structures fabricated by a microwave assisted solvothermal process
-
D. Borah, M.T. Shaw, J.D. Holmes, and M.A. Morris Sub-10 nm feature size PS-b-PDMS block copolymer structures fabricated by a microwave assisted solvothermal process ACS Appl Mater Interfaces 5 2013 2004 2012
-
(2013)
ACS Appl Mater Interfaces
, vol.5
, pp. 2004-2012
-
-
Borah, D.1
Shaw, M.T.2
Holmes, J.D.3
Morris, M.A.4
-
23
-
-
84872137889
-
Orientation and alignment control of microphase separated PS-b-PDMS substrate patterns via polymer brush chemistry
-
D. Borah, S. Rasappa, R. Senthamaraikannan, B. Kosmala, M.T. Shaw, and J.D. Holmes Orientation and alignment control of microphase separated PS-b-PDMS substrate patterns via polymer brush chemistry ACS Appl Mater Interfaces 5 2013 88 97
-
(2013)
ACS Appl Mater Interfaces
, vol.5
, pp. 88-97
-
-
Borah, D.1
Rasappa, S.2
Senthamaraikannan, R.3
Kosmala, B.4
Shaw, M.T.5
Holmes, J.D.6
-
24
-
-
33749849660
-
Templated self-Assembly of block copolymers: Top-down helps bottom-up
-
J.Y. Cheng, C.A. Ross, H.I. Smith, and E.L. Thomas Templated self-Assembly of block copolymers: top-down helps bottom-up Adv Mater 18 2006 2505 2521
-
(2006)
Adv Mater
, vol.18
, pp. 2505-2521
-
-
Cheng, J.Y.1
Ross, C.A.2
Smith, H.I.3
Thomas, E.L.4
-
25
-
-
20244390643
-
Materials science: Directed assembly of block copolymer blends into nonregular device-oriented structures
-
M.P. Stoykovich, M. Müller, S.O. Kim, H.H. Solak, E.W. Edwards, and J.J. De Pablo Materials science: directed assembly of block copolymer blends into nonregular device-oriented structures Science 308 2005 1442 1446
-
(2005)
Science
, vol.308
, pp. 1442-1446
-
-
Stoykovich, M.P.1
Müller, M.2
Kim, S.O.3
Solak, H.H.4
Edwards, E.W.5
De Pablo, J.J.6
-
26
-
-
0042532330
-
Epitaxial self-Assembly of block copolymers on lithographically defined nanopatterned substrates
-
S.O. Kim, H.H. Solak, M.P. Stoykovich, N.J. Ferrier, J.J. De Pablo, and P.F. Nealey Epitaxial self-Assembly of block copolymers on lithographically defined nanopatterned substrates Nature 424 2003 411 414
-
(2003)
Nature
, vol.424
, pp. 411-414
-
-
Kim, S.O.1
Solak, H.H.2
Stoykovich, M.P.3
Ferrier, N.J.4
De Pablo, J.J.5
Nealey, P.F.6
-
27
-
-
34547597717
-
Orientation-controlled self-Assembled nanolithography using a polystyrene-polydimethylsiloxane block copolymer
-
Y.S. Jung, and C.A. Ross Orientation-controlled self-Assembled nanolithography using a polystyrene-polydimethylsiloxane block copolymer Nano Lett 7 2007 2046 2050
-
(2007)
Nano Lett
, vol.7
, pp. 2046-2050
-
-
Jung, Y.S.1
Ross, C.A.2
-
28
-
-
33846216801
-
Comparative study on the surface free energy of a solid calculated by different methods
-
M. Zenkiewicz Comparative study on the surface free energy of a solid calculated by different methods Polym Test 26 2007 14 19
-
(2007)
Polym Test
, vol.26
, pp. 14-19
-
-
Zenkiewicz, M.1
-
29
-
-
0031077901
-
Synthesis and photoinitiated cationic polymerization of monomers with the silsesquioxane core
-
J.V. Crivello, and R. Malik Synthesis and photoinitiated cationic polymerization of monomers with the silsesquioxane core J Polym Sci Pol Chem 35 1997 407 425
-
(1997)
J Polym Sci Pol Chem
, vol.35
, pp. 407-425
-
-
Crivello, J.V.1
Malik, R.2
-
30
-
-
80755189347
-
Assembly of sub-10-nm block copolymer patterns with mixed morphology and period using electron irradiation and solvent annealing
-
J.G. Son, J.-B. Chang, K.K. Berggren, and C.A. Ross Assembly of sub-10-nm block copolymer patterns with mixed morphology and period using electron irradiation and solvent annealing Nano Lett 11 2011 5079 5084
-
(2011)
Nano Lett
, vol.11
, pp. 5079-5084
-
-
Son, J.G.1
Chang, J.-B.2
Berggren, K.K.3
Ross, C.A.4
-
31
-
-
77951732662
-
Robust block copolymer mask for nanopatterning polymer films
-
C.C. Chao, T.-C. Wang, R.-M. Ho, P. Georgopanos, A. Avgeropoulos, and E.L. Thomas Robust block copolymer mask for nanopatterning polymer films ACS Nano 4 2010 2088 2094
-
(2010)
ACS Nano
, vol.4
, pp. 2088-2094
-
-
Chao, C.C.1
Wang, T.-C.2
Ho, R.-M.3
Georgopanos, P.4
Avgeropoulos, A.5
Thomas, E.L.6
-
32
-
-
0035545980
-
Surface morphology of PS-PDMS diblock copolymer films
-
T.H. Andersen, S. Tougaard, N.B. Larsen, K. Almdal, and I. Johannsen Surface morphology of PS-PDMS diblock copolymer films J Electron Spectrosc Relat Phenom 121 2001 93 110
-
(2001)
J Electron Spectrosc Relat Phenom
, vol.121
, pp. 93-110
-
-
Andersen, T.H.1
Tougaard, S.2
Larsen, N.B.3
Almdal, K.4
Johannsen, I.5
|