Nanowire arrays defined by nanoimprint lithography

Nano Letters

Volumn 4, Issue 4, 2004, Pages 699-702

  Mårtensson, Thomas ^a   Carlberg, Patrick ^a   Borgström, Magnus ^a   Montelius, Lars ^a   Seifert, Werner ^a   Samuelson, Lars ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD;

ARTICLE; CATALYSIS; CRYSTAL; ELECTRONICS; LIQUID; NANOTECHNOLOGY; PHOTON; SOLID; VAPOR;

EID: 2342530489     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl035100s     Document Type: Article

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28. For statistical purposes, as many wires as possible should be fitted into a single SEM image. However, one is also limited by the pixel resolution of the SEM and thus there is a tradeoff. Sixty wires per image were found to be a suitable compromise. As such an analysis operates on the limit of the SEM capability it is only intended as a comparison of EBL and NIL. Exact numbers are of less interest.