Direct measurement and modelling of internal strains in ion-implanted diamond

Journal of Physics Condensed Matter

Volumn 25, Issue 38, 2013, Pages

  Bosia, F ^a,b,c   Argiolas, N ^c,d   Bazzan, M ^c,d   Fairchild, B A ^e   Greentree, A D ^f   Lau, D W M ^e   Olivero, P ^a,b,c   Picollo, F ^a,b,c   Rubanov, S ^e   Prawer, S ^e  

^a UNIVERSITY OF TURIN   (Italy)

^b SEZIONE DI TORINO   (Italy)

^c Consorzio Nazionale Interuniversitario per le Scienze Fisiche della Materia ^*  (Italy)

^d UNIVERSITY OF PADOVA   (Italy)

^e UNIVERSITY OF MELBOURNE   (Australia)

^f RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON LAYER; FINITE ELEMENT SIMULATIONS; HIGH RESOLUTION X RAY DIFFRACTION; PHENOMENOLOGICAL MODELING; SATURATION EFFECTS; SIMULTANEOUS IMPLANTATION; SINGLE CRYSTAL DIAMOND; TRANSMISSION ELECTRON;

COMPUTER SIMULATION; ELECTRON ENERGY LOSS SPECTROSCOPY; STRAIN; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

IONS;

EID: 84883565150     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/25/38/385403     Document Type: Article

References (49)

1. Olivero P et al 2005 Ion-beam-assisted lift-off technique for three-dimensional micromachining of freestanding single-crystal diamond Adv. Mater. 17 2427-30 (Pubitemid 41504968)
2. Pezzagna S, Rogalla D, Wildanger D, Meijer J and Zaitsev A 2011 Creation and nature of optical centres in diamond for single-photon emission-overview and critical remarks New J. Phys. 13 035024
3. Hiscocks M P, Ganesan K, Gibson B C, Huntington S T, Ladouceur F and Prawer S 2008 Diamond waveguides fabricated by reactive ion etching Opt. Express 16 19512-9
4. Lagomarsino S et al 2010 Evidence of light guiding in ion-implanted diamond Phys. Rev. Lett. 105 233903
5. Kalish R 2012 The role of ion-implantation in the realization of spintronic devices in diamond Nucl. Instrum. Methods Phys. Res. B 272 42-8
6. Battiato A, Bosia F, Ferrari S, Olivero P, Sytchkova A and Vittone E 2012 Spectroscopic measurement of the refractive index of ion-implanted diamond Opt. Lett. 37 671-3
7. Draganski M A et al 2012 Tailoring the optical constants of diamond by ion implantation Opt. Mater. Express 2 644-9
8. Lee J C, Magyar A P, Bracher D O, Aharonovich I and Hu E L 2013 Fabrication of thin diamond membranes for photonic applications Diamond Relat. Mater. 33 45-8
9. Picollo F et al 2013 A new diamond biosensor with integrated graphitic microchannels for detecting quantal exocytic events from chromaffin cells Adv. Mater. at press
10. Olivero P et al 2011 Focused ion beam fabrication and IBIC characterization of a diamond detector with buried electrodes Nucl. Instrum. Methods Phys. Res. B 269 2340-4
11. Kaneko J H et al 2012 Growth and evaluation of self-standing CVD diamond single crystals on off-axis (001) surface of HP/HT type IIa substrates Diamond Relat. Mater. 26 45-9
12. Fairchild B A et al 2008 Fabrication of ultrathin single-crystal diamond membranes Adv. Mater. 20 4793-8
13. Liao M Y, Hishita S, Watanabe E, Koizumi S and Koide Y 2010 Suspended single-crystal diamond nanowires for high-performance nanoelectromechanical switches Adv. Mater. 22 5393-7
14. Zalalutdinov M K et al 2011 Ultrathin single crystal diamond nanomechanical dome resonators Nano Lett. 11 4304-8
15. Gippius A A, Khmelnitskiy R A, Dravin V A and Tkachenko S D 1999 Formation and characterization of graphitized layers in ion-implanted diamond Diamond Relat. Mater. 8 1631-4
16. Prins J F and Derry T E 2000 Radiation defects and their annealing behaviour in ion-implanted diamonds Nucl. Instrum. Methods Phys. Res. B 166 364-73
17. Prawer S and Kalish R 1995 Ion-beam-induced transformation of diamond Phys. Rev. B 51 15711-22
18. Parikh N R et al 1992 Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing Appl. Phys. Lett. 61 3124-6
19. Picollo F et al 2012 Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond New J. Phys. 14 053011
20. Popov V P, Safronov L N, Naumova O V, Nikolaev D V, Kupriyanov I N and Palyanov Y N 2012 Conductive layers in diamond formed by hydrogen ion implantation and annealing Nucl. Instrum. Methods Phys. Res. B 282 100-7
21. Pastewka L, Moser S, Gumbsch P and Moseler M 2011 Anisotropic mechanical amorphization drives wear in diamond Nature Mater. 10 34-8
22. Prins J F 1988 Activation of boron-dopant atoms in ion-implanted diamonds Phys. Rev. B 38 5576-84
23. Ziegler J F, Ziegler M D and Biersack J P 2010 SRIM - the stopping and range of ions in matter (2010) Nucl. Instrum. Methods Phys. Res. B 268 1818-23
24. Uzan-Saguy C et al 1999 Electrical isolation of GaN by ion implantation damage: experiment and model Appl. Phys. Lett. 74 2441-3 (Pubitemid 129561494)
25. Olivero P et al 2006 Characterization of three-dimensional microstructures in single-crystal diamond Diamond Relat. Mater. 15 1614-21 (Pubitemid 44415412)
26. Hickey D P, Jones K S and Elliman R G 2009 Amorphization and graphitization of single-crystal diamond - a transmission electron microscopy study Diamond Relat. Mater. 18 1353-9
27. Kalish R, Reznik A, Nugent K W and Prawer S 1999 The nature of damage in ion-implanted and annealed diamond Nucl. Instrum. Methods Phys. Res. B 148 626-33
28. Orwa J O, Nugent K W, Jamieson D N and Prawer S 2000 Raman investigation of damage caused by deep ion implantation in diamond Phys. Rev. B 62 5461-72 (Pubitemid 32332372)
29. +-damaged diamond: electrical measurements after rapid thermal annealing to 500 ° C Diamond Relat. Mater. 10 463-8 (Pubitemid 32477557)
30. Lai P F, Prawer S and Bursill L A 2001 Recovery of diamond after irradiation at high energy and annealing Diamond Relat. Mater. 10 82-6 (Pubitemid 32333712)
31. Brunetto R, Baratta G A and Strazzulla G 2004 Raman spectroscopy of ion irradiated diamond J. Appl. Phys. 96 380-6
32. McKenzie W R, Quadir M Z, Gass M H and Munroe P R 2011 Focused ion beam implantation of diamond Diamond Relat. Mater. 20 1125-8
33. Drumm V S et al 2011 Surface damage on diamond membranes fabricated by ion implantation and lift-off Appl. Phys. Lett. 98 231904
34. Fairchild B A et al 2012 Mechanism for the amorphisation of diamond Adv. Mater. 24 2024-9
35. Prins J F, Derry T E and Sellschop J P F 1986 Volume expansion of diamond during diamond implantation Phys. Rev. B 34 8870-4
36. McCulloch D G, Gerstner E G, McKenzie D R, Prawer S and Kalish R 1995 Ion implantation in tetrahedral amorphous carbon Phys. Rev. B 52 850-7
37. McCulloch D G, Prawer S and Hoffman A 1994 Structural investigation of xenon-ion-beam-irradiated glassy carbon Phys. Rev. B 50 5905-17
38. Bosia F et al 2010 Finite element analysis of ion-implanted diamond surface swelling Nucl. Instrum. Methods Phys. Res. B 268 2991-5
39. Bosia F et al 2011 Modification of the structure of diamond with MeV ion implantation Diamond Relat. Mater. 20 774-8
40. Wei Y X, Wang R J and Wang W H 2005 Soft phonons and phase transition in amorphous carbon Phys. Rev. B 72 012203
41. Wu W and Fahy S 1994 Molecular-dynamics study of single-atom radiation-damage in diamond Phys. Rev. B 49 3030-5
42. www.comsol.com.
43. Authier A, Lagomarsino S and Tanner B K 1996 North Atlantic Treaty Organization Scientific Affairs Division. X-ray and Neutron Dynamical Diffraction: Theory and Applications (New York: Plenum)
44. Fujihisa H, Sidorov V A, Takemura K, Kanda H and Stishov S M 1996 Pressure dependence of the lattice constant of diamond: isotopic effects JETP Lett. 63 83-8 (Pubitemid 126718768)
45. Boulle A, Masson O, Guinebretiere R and Dauger A 2003 A new method for the determination of strain profiles in epitaxic thin films using x-ray diffraction J. Appl. Crystallogr. 36 1424-31
46. Oen O S and Robinson M T 1976 Computer studies of the reflection of light ions from solids Nucl. Instrum. Methods 132 647-53
47. Hickey D P, Kuryliw E, Siebein K, Jones K S, Chodelka R and Elliman R 2006 Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamond J. Vac. Sci. Technol. A 24 1302-7 (Pubitemid 43959158)
48. McKenzie D R, Muller D and Pailthorpe B A 1991 Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon Phys. Rev. Lett. 67 773-6
49. Fairchild B A 2013 Ion beam techniques for micro-machining of single crystal diamond PhD Thesis The University of Melbourne