Focused Ion beam implantation of diamond

Diamond and Related Materials

Volumn 20, Issue 8, 2011, Pages 1125-1128

  McKenzie, W R ^a   Quadir, Md Z ^a   Gass, M H ^b   Munroe, P R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b DARESBURY LABORATORY   (United Kingdom)

Author keywords

Amorphous carbon; Diamond; Diamond like carbon; EBSD; EELS; FIB; Focused ion beam; Ion implantation; STEM; TEM

Indexed keywords

AMORPHOUS CARBON LAYER; AMORPHOUS CARBON STRUCTURES; DIAMOND LIKE CARBON; DIAMOND SURFACES; EBSD; ELECTRON BACK-SCATTERED DIFFRACTION; ELECTRON ENERGY LOSS; ENERGY DISPERSIVE X RAY SPECTROSCOPY; EXCESS HYDROGEN; FIB; ION BEAM IMPLANTATION; SCANNING TRANSMISSION ELECTRON MICROSCOPY; STEM;

AMORPHOUS CARBON; BEAM PLASMA INTERACTIONS; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; FOCUSED ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; IONS; TRANSMISSION ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

DIAMONDS;

EID: 80051780820     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.06.022     Document Type: Article

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